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US 11,145,556 B2Granted
Method and device for inspection of semiconductor samples
AssigneeCarl Zeiss SMT GmbH
InventorSi Ping Zhao
Life of this patent
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Abstract
A method and device for inspection or analysis of a semiconductor sample is provided. The method includes: sandwiching a processed semiconductor sample between two blocks of a semiconductor material; polishing the sandwiched sample such that an even surface is obtained; and measuring the surface of the sandwiched sample. The blocks of a semiconductor material comprise the same semiconductor material as the semiconductor sample.
Claims19
A method, comprising:
- sandwiching a processed semiconductor sample between two blocks of a semiconductor material;
- polishing the sandwiched sample to obtain a polished, even surface;
- and
- measuring the polished, even surface of the sample,
- wherein the blocks of a semiconductor material comprise the same semiconductor material as the semiconductor sample, and the polished, even surface comprises a side surface of the semiconductor sample.
2 more elements
A device, comprising:
- a sample stage comprising two blocks of semiconductor material configured to sandwich a semiconductor sample;
- a polishing device configured to polish the surface of the sandwiched processed semiconductor sample;
- and
- a measuring device configured to measure the surface of the sandwiched processed semiconductor sample,
- wherein the polished, even surface comprises a side surface of the semiconductor sample.
2 more elements
A method, comprising:
- polishing a sandwiched sample to obtain a polished, even surface, the sandwiched sample comprising a processed semiconductor sample between two blocks of a semiconductor material;
- and
- measuring the polished, even surface of the sample,
- wherein the blocks of a semiconductor material comprise the same semiconductor material as the semiconductor sample, and the polished, even surface comprises a side surface of the semiconductor sample.
1 more element
Dependencies are inferred from the claim text.