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US 11,145,535 B2Granted
Planarization process, apparatus and method of manufacturing an article
AssigneeCanon Kabushiki Kaisha
InventorsByung-Jin Choi, Seth J. Bamesberger, Se-Hyuk Im
Life of this patent
Estimating the term…
Abstract
A chuck is provided. The chuck comprises a plurality of lands protruding from a surface of the chuck, the lands defining a series of zones; and a trenched recessed from the surface of the chuck in at least one of the zones.
Claims17
A chuck, comprising:
- a plurality of lands protruding from a surface of the chuck, the lands defining a series of zones;
- and
- a trench recessed from the surface of the chuck in at least one of the zones,
- wherein the series of zones includes a peripheral zone immediately adjacent to an outermost land of the plurality of lands and one or more inner zones surrounded by the peripheral zone, and the trench is formed in at least one of the inner zones at an area distal to a center of the chuck, and
- the trench is formed in the peripheral zone at an area proximal to the center of the chuck.
2 more elements
A method of using a chuck, comprising:
- providing a chuck having a series of zones defined by a plurality of lands protruding from a surface of the chuck and a trenched recessed from the surface of the chuck in at least one of the series of zones;
- retaining a superstrate on the surface of the chuck;
- advancing the superstrate to be in contact with a formable material dispensed the substrate;
- curing the formable material with a curing source;
- and
- separating the superstrate from the cured formable material,
- wherein the series of zones includes a peripheral zone immediately adjacent to an outermost land of the plurality of lands and one or more inner zones surrounded by the peripheral zone, and the trench is formed in each of the inner zones at an area distal to a center of the chuck.
4 more elements
A method of manufacturing an article, comprising:
- dispensing a formable material on a substrate;
- retaining a superstrate with a superstrate chuck, wherein:
- the superstrate chuck being defined with a series of zones by a plurality of lands protruding from a surface of thereof;
- and
- a trench recessed from the surface of the superstrate chuck is formed in at least one of the series of zones;
- advancing the superstrate to be in contact with a formable material dispensed on the substrate;
- curing the formable material with a curing source;
- and
- separating the superstrate from the cured formable material,
- wherein the series of zones includes a peripheral zone immediately adjacent to an outermost land of the plurality of lands and one or more inner zones surrounded by the peripheral zone, and the trench is formed in each of the inner zones at an area distal to a center of the chuck.
7 more elements
Dependencies are inferred from the claim text.