Method for charging gas into cassette pod
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsWei-Yu Lai, Hung-Wen Chen
Life of this patent
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Abstract
A method for transporting a cassette pod for containing semiconductor wafers is provided. The method includes transporting a cassette pod configured to receive a semiconductor wafer with a transporting apparatus. The method further includes supplying a gas from a cylinder into a housing of the cassette pod. The cylinder is externally positioned on the housing. The method also includes detecting a gas pressure in the cylinder with a detection element. In addition, the method includes issuing a signal to the transporting apparatus when the gas pressure in the cylinder is lower than a predetermined limit.
Claims20
A method for transporting a cassette pod for containing semiconductor wafers, comprising:
- supplying a gas from a cylinder into a housing of the cassette pod during transportation of the cassette pod by a transporting apparatus, wherein the cylinder is connected to the housing;
- issuing a signal to the transporting apparatus when the gas pressure in the cylinder is lower than a predetermined limit;
- transporting the cassette pod to a work station when the signal is issued;
- and
- removing the semiconductor wafers to another cassette pod which is equipped with another cylinder filled with the gas.
A method for transporting a cassette pod for containing semiconductor wafers, comprising:
- processing the semiconductor wafers with a processing apparatus;
- placing the semiconductor wafers processed by the processing apparatus into a housing of the cassette pod;
- supplying a gas from a cylinder into the housing of the cassette pod during transportation of the cassette pod by a transporting apparatus, wherein the cylinder is connected to the housing, and the supply of the gas from the cylinder to the housing is initiated prior to removing the cassette pod from the processing apparatus;
- moving the cassette pod to a work station to replace the cylinder with another cylinder filled with the gas in response to a signal issued by a detection element when the gas pressure in the cylinder is lower than a predetermined limit;
- and
- transporting the cassette pod with the transporting apparatus from the processing apparatus to a predetermined destination when the signal is not issued.
A method for transporting a cassette pod for containing semiconductor wafers, comprising:
- placing a housing of a cassette pod on a gas purging assembly including a purge tool;
- discharging a gas from the gas purging assembly into the housing via the purge tool;
- connecting a cylinder to the housing;
- and
- discharging another gas from the cylinder into the housing after the cassette is removed from the gas purging assembly.
Dependencies are inferred from the claim text.