Multiple electron beams irradiation apparatus

A multiple electron beam irradiation apparatus comprising:

• a forming mechanism that forms multiple primary electron beams;
• a plurality of electrode array substrates each that disposes thereon a plurality of electrodes each being arranged at a passage position of each of the multiple primary electron beams, the plurality of electrode array substrates being stacked, the each of the multiple primary electron beams being surrounded by an electrode of the plurality of electrodes in a case where the each of the multiple primary electron beams passes through the passage position;
• a first wiring and a second wiring that are applied with one of different electric potentials;
• and
• a stage that mounts thereon a target object to be irradiated with the multiple primary electron beams having passed through the plurality of electrode array substrates,
• wherein, in each of the plurality of electrode array substrates, each of the plurality of electrodes is electrically connected to either one of the first wiring and the second wiring, and at least one of the plurality of electrode array substrates has both of an electrode electrically connected to the first wiring and an electrode electrically connected to the second wiring.