Lithographic apparatus comprising an object with an upper layer having improved resistance to peeling off
AssigneeASML Netherlands B.V.
InventorsAndrey Nikipelov, Vadim Yevgenyevich Banine, Joost André Klugkist, Maxim Aleksandrovich Nasalevich, Roland Johannes Wilhelmus Stas, Sando Wricke
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Abstract
A lithographic apparatus has an object, the object includes: a substrate and optionally a lower layer on the substrate; an upper layer; and an intermediate layer between the upper layer and the substrate, wherein a bond strength between the intermediate layer and the substrate or lower layer is greater than a bond strength between the intermediate layer and the upper layer and the intermediate layer has a Young's Modulus and/or a Poisson ratio within 20% of that of the upper layer.
Claims23
A lithographic apparatus comprising an object, the object comprising:
- a substrate;
- an upper layer;
- and
- an intermediate layer between the upper layer and the substrate or between the upper layer and a lower layer on the substrate when on the substrate,
- wherein:
- a bond strength between the intermediate layer and the substrate or between the intermediate layer and the lower layer when on the substrate, is greater than a bond strength between the intermediate layer and the upper layer, and
- the intermediate layer has a Young's Modulus and/or a Poisson ratio within 20% of that of the upper layer.
An object for use in a lithographic apparatus, the object comprising:
- a substrate;
- an upper layer;
- and
- an intermediate layer between the upper layer and the substrate or between the upper layer and a lower layer on the substrate when on the substrate,
- wherein:
- a bond strength between the intermediate layer and the substrate or between the intermediate layer and the lower layer when on the substrate, is greater than a bond strength between the intermediate layer and the upper layer, and
- the intermediate layer has a Young's Modulus and/or a Poisson ratio within 20% of that of the upper layer.
Dependencies are inferred from the claim text.