Method of performance testing working parameters of a fluid handling structure and a method of detecting loss of immersion liquid from a fluid handing structure in an immersion lithographic apparatus

A method of performance testing a fluid handing structure and associated working parameters for a given exposure recipe of a substrate in an immersion lithographic apparatus, the method comprising:

• confining liquid between a projection system of the immersion lithographic apparatus and a table and/or the substrate by operating the fluid handing structure using the associated working parameters, the substrate comprising an upper surface coated with resist;
• moving the substrate under the fluid handing structure according to the exposure recipe and exposing the resist with a patterned beam of radiation according to the exposure recipe;
• and
• detecting change to and/or residue on the resist as a result of liquid being left behind on the resist by directing electromagnetic radiation at the resist and collecting non zeroth order diffracted radiation reflected from the resist.

A method comprising:

• first moving a dosage sensor under a fluid handing structure in an immersion lithographic apparatus so that the dosage sensor becomes covered with immersion liquid in order to condition the dosage sensor;
• second moving the dosage sensor out from under the fluid handing structure;
• allowing at least partial evaporation of any immersion liquid on the dosage sensor so that a cooling load is induced on the dosage sensor;
• third moving the dosage sensor under the fluid handing structure;
• irradiating in which the dosage sensor is exposed to a radiation beam from the projection system of the immersion lithographic apparatus;
• and
• measuring a response of the dosage sensor to the irradiating and determining the cooling load on the basis that the dose of the irradiating is known and any divergence from the known dose in the measuring is due to a temperature sensitivity of the dosage sensor.