Fabrication of micro/nanoscale barcodes using cantilever-free scanning probe lithography
AssigneeTera-Print, LLC
InventorsAndrey Ivankin, Jared A. Magoline
Life of this patent
Estimating the term…
Abstract
Cantilever-Free Scanning Probe Lithography (CF-SPL) techniques are used to enable generation of 1-, 2-, 3-, and 4-D information containing patterns in a mask-free manner that, in turn, enables instantaneous change of pattern design.
Claims20
A Cantilever-Free Scanning Probe Lithography (CF-SPL) technique, comprising:
- using lithography and a CF-SPL platform to fabricate at least one information containing pattern, while controlling feature density and composition, wherein the at least one information containing pattern includes micro- and/or nano-scale features that encode information of the at least one information containing pattern based on physicochemical properties of the features that are detectable or observable to read the encoded information, wherein information encoded based on physicochemical properties of the features includes formation of the features using at least one of chemical, physical, mechanical, or thermal properties that are detectable or observable by reader to read the encoded information.
A lithography instrument utilizing a Cantilever-Free Scanning Probe Lithography (CF-SPL) technique, the lithography instrument comprising a control system and an tip array, wherein the control system is configured to perform lithography and a CF-SPL platform to fabricate at least one information containing pattern, while controlling feature density and composition, and wherein the at least one information containing pattern includes micro and/or nanoscale features that encode information of at least one information containing pattern based on physicochemical properties of the features that can be detected or observed by a reader to read the encoded information, wherein information encoded based on physicochemical properties of the features includes formation of the features using at least one of chemical, physical, mechanical, or thermal properties that are detectable or observable to read the encoded information.
Dependencies are inferred from the claim text.