Pellicle removal method
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChue San Yoo, Chih-Chiang Tu, Chien-Cheng Chen, Jong-Yuh Chang, Kun-Lung Hsieh, Pei-Cheng Hsu, Hsin-Chang Lee, Yun-Yue Lin
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Abstract
A method of removing a pellicle from a photomask includes removing a portion of a membrane from a pellicle frame, wherein the pellicle frame remains attached to the photomask following the removing of the portion of the membrane. The method further includes removing the pellicle frame from the photomask. The method further includes cleaning the photomask.
Claims20
A method of removing a pellicle from a photomask, the method comprising:
- removing a portion of a membrane from a pellicle frame, wherein the pellicle frame remains attached to the photomask following the removing of the portion of the membrane, and the portion of the membrane extending toward a center of the pellicle frame from an inner edge of the pellicle frame;
- removing the pellicle frame from the photomask;
- and
- cleaning the photomask.
A method of using a pellicle, the method comprising:
- attaching the pellicle to a photomask, wherein the photomask comprises a patterned surface, and the pellicle comprises a pellicle frame and a membrane extending across the pellicle frame and covering the patterned surface;
- removing a portion of the membrane from the pellicle frame, wherein the pellicle frame remains attached to the photomask following the removing of the portion of the membrane, and the portion of the membrane is inside a boundary of the pellicle frame;
- and
- removing the pellicle frame from the photomask.
A device comprising:
- a photomask having a patterned surface;
- and
- a pellicle attached to the photomask, wherein the pellicle comprises:
- a frame attached to the photomask, wherein the frame comprises at least one vent hole;
- a filter covering at least one side of the at least one vent hole, wherein the filter directly connects to a surface of the frame;
- a membrane extending over the patterned surface;
- and
- a mount between the frame and the membrane, wherein the mount is attached to the frame by an adhesive.
Dependencies are inferred from the claim text.