US 11,143,863 B2Granted

Optical scanning device

AssigneeMitsumi Electric Co., Ltd.

InventorTsukasa Yamada

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Abstract

An optical scanning device includes a drive beam configured to support a mirror, and a drive source provided on the drive beam and configured to oscillate the mirror about a predetermined axis passing through the center of the light reflecting surface of the mirror. The drive beam includes multiple beams each extending in a direction perpendicular to the predetermined axis and one or more turn-back parts each connecting ends of adjacent beams, and has a zigzag shape as a whole. The multiple beams include a first beam, a second beam adjacent to the first beam, and a third beam adjacent to the second beam, the one or more turn-back parts include a first turn-back part connecting the first and second beams and a second turn-back part connecting the second and third beams, and the first and second turn-back parts are different in weight.

Claims13

Dependent claims

An optical scanning device comprising:

a fixed frame;
a mirror provided within the fixed frame and including a light reflecting surface on an upper side of the optical scanning device;
a first drive beam and a second drive beam provided on a right side and a left side, respectively, of the mirror and configured to support the mirror within the fixed frame;
and
a drive source provided on the first drive beam and the second drive beam, the drive source being configured to oscillate the mirror about a predetermined axis passing through a center of the light reflecting surface,
wherein each of the first drive beam and the second drive beam includes a plurality of beams each extending in a direction perpendicular to the predetermined axis and one or more turn-back parts each connecting ends of adjacent beams among the plurality of beams, each of the first drive beam and the second drive beam having a zigzag shape as a whole, and
wherein the plurality of beams include a first beam, a second beam adjacent to the first beam, a third beam adjacent to the second beam, and a fourth beam adjacent to the third beam,
the one or more turn-back parts include a first turn-back part connecting the first and second beams, a second turn-back part connecting the second and third beams, and a third turn-back part connecting the third and fourth beams,
the first turn-back part and the second turn-back part have different weights by having different heights, the heights being respective maximum lengths of the first and second turn-back parts in the direction perpendicular to the predetermined axis,
the third turn-back part has a weight different from the weight of the first turn-back part by having a height different from the height of the first turn-back part, the height of the third turn-back part being a maximum length of the third turn-back part in the direction perpendicular to the predetermined axis, and
the first turn-back part and the third turn-back part face a same inner side of the fixed frame, and a distance between the first turn-back part and the inner side of the fixed frame is different from a distance between the third turn-back part and the inner side of the fixed frame.

8 more elements

An optical scanning device comprising:

a fixed frame;
a mirror provided within the fixed frame and including a light reflecting surface on an upper side of the optical scanning device;
a movable frame supporting the mirror within the fixed frame;
a first drive beam and a second drive beam provided on a right side and a left side, respectively, of the movable frame to support the movable frame within the fixed frame;
a first connection part connecting the movable frame and the first drive beam;
a second connection part connecting the movable frame and the second drive beam;
and
a drive source provided on the first drive beam and the second drive beam, the drive source being configured to oscillate the mirror about a predetermined axis passing through a center of the light reflecting surface,
wherein each of the first drive beam and the second drive beam includes a plurality of beams each having a width in a first direction along the predetermined axis and a length in a second direction perpendicular to the predetermined axis, and one or more turn-back parts each connecting ends of adjacent beams among the plurality of beams, each of the first drive beam and the second drive beam having a zigzag shape as a whole, and
wherein the plurality of beams include a first beam, a second beam adjacent to the first beam, and a third beam adjacent to the second beam,
the one or more turn-back parts include a first turn-back part connecting the first and second beams and a second turn-back part connecting the second and third beams, and
the first turn-back part and the second turn-back part have different weights by including respective ribs that are different in weight, the ribs being on a lower side of the optical scanning device opposite to the upper side, the ribs each including a first portion elongated in the first direction and a second portion extending from the first portion in the second direction to protrude away from a space in which the plurality of beams are provided, the ribs having different weights by including the respective second portions that are different in shape.

9 more elements

Dependencies are inferred from the claim text.

Facts

Application: 15/956,323Filed 18 Apr 2018
Priority: JP JP2017-09068928 Apr 2017
Published: US 2018/0314059 A11 Nov 2018
Granted: 12 Oct 2021
Term ends: Not estimatedThe source records don’t support an estimate.

Classification6 codes

G02B 26/123
Using multifaceted mirrors: multibeam scanners, e.g. using multiple light sources or beam splitters
G02B 26/0858
The reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD: the reflecting means being moved or deformed by piezoelectric means
G02B 26/101
Scanning systems: with both horizontal and vertical deflecting means, e.g. raster or XY scanners
G02B 26/127
Using multifaceted mirrors: adaptive control of the scanning light beam, e.g. using the feedback from one or more detectors