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US 11,143,858 B2Granted
MEMS scanning module for a light scanner
AssigneeBlickfeld GmbH
InventorFlorian Petit
Life of this patent
Estimating the term…
Abstract
A scanning module (100) for a light scanner (99) comprises a base (141) and an interface element (142) which is configured to secure a mirror surface (151). The scanning module (100) also comprises at least one support element (101, 102) which extends between the base (141) and the interface element (142) and has an extension perpendicular to the mirror surface (151) which is no less than 0.7 mm. The base (141), the interface element (142) and the at least one support element (101) are integrally formed.
Claims11
A scanning module for a light scanner, which comprises:
- a base,
- an interface element which is configured to secure a mirror surface, and
- at least one support element, which is configured to be resilient, and extends between the base and the interface element and has an extension perpendicular to the mirror surface which is no less than 0.7 mm,
- wherein the base, the interface element and the at least one support element are integrally formed,
- an additional base which is connected to the base and is not integrally formed therewith,
- an additional interface element, which is connected to the interface element, not integrally formed therewith and configured to secure the mirror surface, and
- at least one additional support element which is configured to be resilient, and extends between the additional base and the additional interface element.
4 more elements
Dependencies are inferred from the claim text.