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US 11,143,670 B2Granted
Sensing an ICMFB output to detect functional state of a MEMS sensor
AssigneeSTMicroelectronics S.r.l.
InventorsDavy Choi, Yamu Hu, Deyou Fang
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Abstract
In one embodiment, a method for detecting functional state of a microelectromechanical (MEMS) sensor is described. The method includes monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit coupled to the MEMS sensor through a plurality of nodes. The method also includes determining, using the monitored ICMFB voltage, whether all of the plurality of nodes of the MEMS sensor are electrically connected to the ICMFB circuit.
Claims9
A method comprising:
- monitoring an input common-mode feedback (ICMFB) voltage generated by an ICMFB circuit, the ICMFB coupled to a microelectromechanical system (MEMS) sensor through a plurality of nodes, the monitoring comprising:
- measuring, by a sample and hold (S/H) circuit, a first ICMFB voltage generated by the ICMFB circuit operating in a first operating mode, and
- measuring, by the S/H circuit, a second ICMFB voltage generated by the ICMFB circuit in a second operating mode;
- computing a first differential voltage corresponding to a difference between the first ICMFB voltage and the second ICMFB voltage;
- computing a second differential voltage corresponding to a difference between the first differential voltage and a predetermined voltage measured;
- and
- determining whether all of the plurality of nodes is electrically connected to the ICMFB circuit in accordance with the second differential voltage.
4 more elements
Dependencies are inferred from the claim text.