Passive microphone/pressure sensor using a piezoelectric diaphragm
AssigneeResonant Inc.
InventorsViktor Plesski, Soumya Yandrapalli, Julius Koskela, Ventsislav Yantchev
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Abstract
There are disclosed pressure-sensitive acoustic resonators and remote pressure sensing systems and methods. A pressure-sensitive acoustic resonator includes a conductor pattern formed on a planar surface of a dielectric substrate, the conductor pattern including an interdigital conductor pattern (ICP), and a diaphragm, the diaphragm being a portion of a plate of single-crystal piezoelectric material, the diaphragm having a front surface exposed to an environment and a back surface facing, but not contacting, the ICP.
Claims25
A pressure-sensitive acoustic resonator, comprising:
- a conductor pattern formed on a planar surface of a dielectric substrate, the conductor pattern including an interdigital conductor pattern (ICP);
- and
- a diaphragm, the diaphragm being a portion of a plate of single-crystal piezoelectric material, the diaphragm having a front surface exposed to an environment and a back surface facing, but not contacting, the ICP, wherein one or more pressure relief holes are formed through the diaphragm.
A remote pressure sensing system, comprising:
- a passive pressure sensor including a pressure-sensitive acoustic resonator coupled to a first antenna;
- and
- a reader comprising:
- a transmitter to transmit, via a second antenna, an interrogation signal to the passive pressure sensor,
- a receiver to receive a response signal from the passive pressure sensor, and
- a controller to determine an air pressure at the passive sensor based on the response signal,
- wherein the pressure-sensitive acoustic resonator comprises:
- a conductor pattern formed on a planar surface of a dielectric substrate, the conductor pattern including an interdigital conductor pattern (ICP);
- and
- a diaphragm, the diaphragm being a portion of a plate of single crystal piezoelectric material, the diaphragm having a front surface exposed to an environment and a back surface facing, but not contacting, the ICP, wherein one or more pressure relief holes are formed through the diaphragm.
A method for remotely measuring pressure, comprising:
- transmitting an interrogation signal to a passive pressure sensor including a pressure-sensitive acoustic resonator;
- receiving a response signal from the passive pressure sensor;
- and
- determining an air pressure at the passive sensor based on the response signal,
- wherein the pressure-sensitive acoustic resonator comprises:
- a conductor pattern formed on a planar surface of a dielectric substrate, the conductor pattern including an interdigital conductor pattern (ICP);
- and
- a diaphragm, the diaphragm being a portion of a plate of single-crystal piezoelectric material, the diaphragm having a front surface exposed to an environment and a back surface facing, but not contacting, the ICP, wherein one or more pressure relief holes are formed through the diaphragm.
Dependencies are inferred from the claim text.