Catalyst material and method for manufacturing the same
AssigneeIndustrial Technology Research Institute
InventorsKuo-Hsin Lin, Li-Duan Tsai, Wen-Hsuan Chao, Yu-Ming Lin, Pin-Hsin Yang, Hsiao-Chun Huang, Chiu-Ping Huang, Jiunn-Nan Lin
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Abstract
A method for manufacturing catalyst material is provided, which includes putting an M′ target and an M″ target into a nitrogen-containing atmosphere, in which M′ is Ni, Co, Fe, Mn, Cr, V, Ti, Cu, or Zn, and M″ is Nb, Ta, or a combination thereof. Powers are provided to the M′ target and the M″ target, respectively. Providing ions to bombard the M′ target and the M″ target to sputtering deposit M′aM″bN2 on a substrate, wherein 0.7≤a≤1.7, 0.3≤b≤1.3, and a+b=2, wherein M′aM″bN2 is a cubic crystal system.
Claims7
A catalyst material, having a chemical structure of:
- M′aM″bN2,
- wherein M′ is Ni, Co, Fe, Mn, Cu, or Zn;
- M″ is Nb, Ta, or a combination thereof;
- 0.7≤a≤1.7, 0.3≤b≤1.3, and a+b=2,
- wherein the catalyst material is a cubic crystal system.
Dependencies are inferred from the claim text.