Method for producing single crystal substrate having a plurality of grooves using a pair of masks
AssigneeSeiko Epson Corporation
InventorsYukimune Watanabe, Noriyasu Kawana
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Abstract
A single crystal substrate is provided and is characterized in that the single crystal substrate has a foundation substrate provided with a plurality of grooves, which include a first crystal face and a second crystal face opposed to the first crystal face in an inner face thereof, and the extending direction of which is a <110> direction, and an angle formed by the first crystal face and the second crystal face is more than 70.6°. Further, it is preferred that the angle formed by the first crystal face and the second crystal face is 100° or more and 176° or less.
Claims1
A method for producing a single crystal substrate that is a method for producing a single crystal substrate including a foundation substrate having a plurality of grooves, in which a first crystal face and a second crystal face forming an angle more than 70.6° with respect to the first crystal face extend in a <110> direction, characterized by comprising:
- a step of forming a plurality of first masks on a cubic single crystal base material, the plurality of first masks being spaced apart from each other such that a surface of the cubic single crystal base material is exposed between adjacent first masks;
- a step of providing a plurality of second masks on the exposed surfaces of the cubic single crystal base material between the adjacent first masks;
- a step of etching the cubic single crystal base material by heating the cubic single crystal base material to sublimate a portion of the cubic single crystal base material located beneath the first masks, thereby forming the groove in a region facing the first mask in the surface of the cubic single crystal base material;
- and
- a step of removing the first mask.
Dependencies are inferred from the claim text.