Component for semiconductor production device, and production method of component for semiconductor production device
AssigneeNgk Spark Plug Co., Ltd.
InventorsKohei Mitsuya, Hideo Tange, Motoki Hotta, Takamichi Ogawa
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Abstract
A semiconductor production device component includes a first ceramic member including an AlN-based material, a second ceramic member including an AlN-based material, and a joint layer disposed between the first ceramic member and the second ceramic member so as to join the first ceramic member and the second ceramic member to each other. The joint layer includes a composite oxide containing Gd and Al, and Al2O3, and is free from AlN.
Claims5
A semiconductor production device component comprising:
- a first ceramic member including an AlN-based material in which AlN is the largest component by weight proportion,
- a second ceramic member including an AlN-based material in which AlN is the largest component by weight proportion, and
- a joint layer disposed between the first ceramic member and the second ceramic member so as to join the first ceramic member and the second ceramic member to each other, wherein
- the joint layer is composed of a composite oxide containing Gd and Al, and Al2O3.
A method for producing a semiconductor production device component, comprising:
- a step of providing a first ceramic member including an AlN-based material in which AlN is the largest component by weight proportion,
- a step of providing a second ceramic member including an AlN-based material in which AlN is the largest component by weight proportion, and
- a step of joining the first ceramic member and the second ceramic member to each other by thermally pressing the first ceramic member and the second ceramic member to each other via a joint agent which is composed of Gd2O3 and Al2O3 and which is disposed between the first ceramic member and the second ceramic member.
A semiconductor production device component comprising:
- a first ceramic member including an AlN-based material in which AlN is the largest component by weight proportion,
- a second ceramic member including an AlN-based material in which AlN is the largest component by weight proportion, and
- a plurality of joint sections disposed between the first ceramic member and the second ceramic member so as to join the first ceramic member and the second ceramic member to each other, wherein
- the joint sections are composed of a composite oxide containing Gd and Al, and Al2O3.
Dependencies are inferred from the claim text.