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US 11,142,453 B2Granted
MEMS device stress-reducing structure
AssigneeTDK Corporation
InventorsKlaus Mayer, Christian Siegel, Anton Leidl, Wolfgang Pahl, Stefan Stufler
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Abstract
A MEMS device is disclosed. In an embodiment a MEMS device includes a substrate having an active region and at least one integrated electrical and mechanical connection element configured to electrically and mechanically mount the MEMS device to a carrier, wherein the connection element comprises a stress-reducing structure.
Claims16
A micro-electromechanical systems (MEMS) device comprising:
- a substrate comprising an active region;
- at least one integrated electrical and mechanical connection element on a mounting side of the MEMS device, the at least one integrated electrical and mechanical connection element configured to electrically and mechanically mount the MEMS device with the mounting side to a carrier,
- wherein the connection element comprises a stress-reducing structure,
- wherein the connection element is at least partly formed by a part of the substrate,
- wherein the connection element comprises at least one contact pad on the mounting side, and
- wherein a trench on the mounting side in the substrate completely surrounds the contact pad;
- and
- a conductor track partly arranged on a bridge element reaching over the trench.
5 more elements
A micro-electromechanical systems (MEMS) device comprising:
- a substrate comprising an active region;
- at least two integrated electrical and mechanical connection elements on a mounting side of the MEMS device, the at least two integrated electrical and mechanical connection elements configured to electrically and mechanically mount the MEMS device with the mounting side to a carrier,
- wherein each connection element comprises a stress-reducing structure,
- wherein each connection element is at least partly formed by a part of the substrate,
- wherein each connection element comprises at least one contact pad on the mounting side, and
- wherein each contact pad is completely surrounded by a trench on the mounting side;
- and
- a conductor track partly arranged on a bridge element reaching over the trench.
5 more elements
Dependencies are inferred from the claim text.