Ramping of sensor power in a microelectromechanical system device
AssigneeKnowles Electronics, LLC
InventorsClaus Fürst, Venkataraman Chandrasekaran
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Abstract
A microelectromechanical system (MEMS) device includes at least one substrate, a lid, a MEMS component, a sensor, and a power supply. The lid is coupled to the substrate so that the substrate and the lid cooperatively define an interior cavity. The MEMS component is disposed within the interior cavity. The sensor is disposed within the interior cavity and is arranged to detect a parameter of the interior cavity. The power supply provides current to the sensor. The power supply is configured to control current during a ramp-up transition of the current and a ramp-down transition of the current such that the ramp-up transition and the ramp-down transition have attenuated high-frequency components.
Claims20
A microelectromechanical system (MEMS) device, comprising:
- a MEMS element;
- a sensor for detecting a parameter;
- and
- a power supply providing current to the sensor, the power supply arranged to control current during a ramp-up transition of the current and a ramp-down transition of the current, the control of the current during the ramp-up transition and the ramp-down transition attenuating high-frequency components of the provided current.
A method of providing power from a power supply to a sensor positioned within a microelectromechanical system (MEMS) device, the method comprising:
- providing current from the power supply to the sensor according to a ramp-up profile, wherein the current from the power supply is controlled such that the ramp-up profile has attenuated high-frequency components;
- providing current from the power supply to the sensor according to a ramp-down profile, wherein the current from the power supply is controlled such that the ramp-down profile has attenuated high-frequency components;
- and
- providing power to the sensor between a ramp-up transition associated with the ramp-up profile and a ramp-down transition associated with the ramp-down profile sufficient to maintain the sensor in an ON state.
A microelectromechanical systems (MEMS) device comprising:
- a housing having a sound port;
- an acoustic MEMS transducer disposed in the housing and acoustically coupled to the sound port;
- a non-acoustic sensor disposed in the housing;
- and
- an electrical circuit disposed in the housing and electrically coupled to the transducer, the sensor, and to an external interface of the housing;
- wherein the electrical circuit includes a power supply coupled to the sensor and configured to provide a current pulse to the sensor, the current pulse having a ramp-up portion, a power-delivery portion, and a ramp-down portion;
- and
- wherein profiles of the ramp-up portion and the ramp-down portion are configured to reduce acoustic artifacts at an output of the MEMS device.
Dependencies are inferred from the claim text.