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US 11,141,890 B2Granted
Substrate including nano/micro structure, method for manufacturing the same, method for refining nano/micro structure, method for manufacturing nano/micro structure network, and manufacturing apparatus therefor
AssigneeLG Display Co., Ltd.
InventorsTaewhan Kim, Dongchul Choo, Jungyu Lee
Life of this patent
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Abstract
Provided is a manufacturing method for a substrate having a microstructure. The manufacturing method for a substrate having a microstructure comprises the steps of: forming a microstructure on the upper surface of an auxiliary substrate; coating a base solution on the microstructure; forming a base substrate covering the microstructure by heattreating the base solution; and removing the auxiliary substrate from the base substrate.
Claims11
A method for manufacturing a substrate including nano/micro structures, comprising:
- forming a nano material on an upper surface of an auxiliary substrate;
- forming nano/micro structures on the upper surface of the auxiliary substrate;
- coating a base solution on the nano/micro structures to fill gaps between the nano/micro structures and the auxiliary substrate and between the nano/micro structures;
- forming a base substrate covering the nano/micro structures by performing a heat treatment to the base solution;
- removing the auxiliary substrate from the base substrate to expose a main planar surface at a top surface of the base substrate adjacent to the upper surface of the auxiliary substrate, the exposed main planar surface including at least a first portion without the nano/micro structures and the nano material, a second portion including the nano/micro structures, and a third portion including the nano material, wherein the first portion, the second portion, and the third portion are disposed in a same plane;
- and
- performing a heat treatment process to the base substrate for improving the bondability of the nano/micro structures after the main planar surface is exposed, and
- wherein the nano material includes at least any one of graphene flake, single-walled CNT, double-walled CNT, multi-walled CNT, C60, C85, or C70, and
- wherein the nano/micro structures include metal nano wires, and
- the nano material improves the bonding and a dispersity of the nano/microstructures compared to the base substrate without the nano material.
7 more elements
Dependencies are inferred from the claim text.