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US 11,137,415 B2Granted
Vibrating device, vibrating device module, electronic apparatus, and vehicle
AssigneeSeiko Epson Corporation
InventorYoshiyuki Matsuura
Life of this patent
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Abstract
A vibrating device includes: a base body containing mobile ions; a movable member disposed facing and spaced apart from the base body; and a conductor section disposed so as to cover at least a portion of the movable member. A first voltage whose potential periodically changes based on a reference potential is applied to the movable member. A second voltage that is at the reference potential when time-averaged is applied to the conductor section. The second voltage is constant at the reference potential.
Claims20
A vibrating device comprising:
- a base body containing mobile ions;
- a movable member overlapping the base body in a plan view, the movable member being configured to selectively receive a first voltage;
- and
- a conductor overlapping the movable member in the plan view, the conductor being configured to selectively receive a second voltage,
- wherein the first voltage has a potential that periodically changes based on a reference potential, and
- the second voltage is at a time-averaged value of the reference potential.
3 more elements
A vibrating device module comprising:
- a vibrating device including:
- a base body containing mobile ions;
- a movable member overlapping the base body in a plan view, the movable member being configured to selectively receive a first voltage;
- and
- a conductor overlapping the movable member in the plan view, the conductor being configured to selectively receive a second voltage,
- wherein the first voltage has a potential that periodically changes based on a reference potential, and
- the second voltage is at a time-averaged value of the reference potential;
- and
- a circuit electrically connected with the vibrating device.
6 more elements
A vibrating device comprising:
- a base containing mobile ions;
- a post upstanding from the base;
- a conductive proof mass having an anchor mounted to the post, torsion beams laterally extending from the anchor, and a movable member pivotally supported in a spaced apart relation relative to the base by the torsion beams, the torsion beams defining a pivot axis asymmetrically dividing the movable member into first and second longitudinally extending platforms;
- a first detection electrode on the base, the first detection electrode facing the first platform;
- a second detection electrode on the base, the second detection electrode facing a proximal face of the second platform, the proximal face being adjacent the post, the first and second detection electrodes being configured to output an electrical signal in response to the pivoting of the movable member relative to the base;
- a dummy electrode on the base, the dummy electrode facing a distal face of the second platform, the distal face being spaced away from the post;
- a conductive lid bonded to the base and accommodating the proof mass in a space between the base and the lid;
- and
- a conductive layer on an opposite side of the base as the movable member,
- wherein the movable member is configured to receive a first voltage,
- at least one of the conductive lid and the conductive layer is configured to receive a second voltage,
- the first voltage has a potential that periodically changes based on a reference potential, and
- the second voltage is at a time-averaged value of the reference potential.
10 more elements
Dependencies are inferred from the claim text.