Device for suppressing stray radiation
AssigneeInfineon Technologies AG
InventorsWerner Simbuerger, Eduardo Schittler Neves, Andreas Wiesbauer
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Abstract
A device for suppressing stray radiation includes a Micro-ElectroMechanical System (MEMS) sensor module and a conductive cage structure. The conductive cage structure may enclose the MEMS sensor module in order to suppress penetration of stray electromagnetic radiation with a stray wavelength λo into the conductive cage structure, and the conductive cage structure may be arranged to be thermally insulated from the MEMS sensor module. The device may also include a connecting line. The connecting line may be connected to the MEMS sensor module and fed through the conductive cage structure by a capacitive element.
Claims22
A device, comprising:
- a Micro-ElectroMechanical System (MEMS) sensor module;
- a conductive cage structure, the conductive cage structure enclosing the MEMS sensor module in order to suppress penetration of stray electromagnetic radiation with a stray wavelength λo into the conductive cage structure, and the conductive cage structure being arranged thermally insulated from the MEMS sensor module;
- and
- at least one connecting line, the at least one connecting line being connected to the MEMS sensor module and fed through the conductive cage structure by a capacitive element.
Dependencies are inferred from the claim text.