Magnetoresistance effect element

A method of manufacturing a magnetoresistance effect element having a laminated body, in which a first ferromagnetic metal layer, a tunnel barrier layer and a second ferromagnetic metal layer are laminated in an order, the tunnel barrier layer being made of a compound in a spinel structure,

• the method comprising the step of forming the tunnel barrier layer by repeating a process of forming a metal layer and a process of oxidizing the metal layer, wherein
• the laminated body is provided on a substrate,
• the process of oxidizing the metal layer is performed after cooling the substrate to −70° C. to −30° C.,
• wherein the laminated body is provided on the substrate indirectly via an intermediate layer,
• wherein the intermediate layer is an under-layer,
• wherein the under-layer is made of a layer having a stacked structure with a combination of two or more of layers of:
• a nitride layer having a (001)-oriented NaCl structure and containing at least one element selected from the group consisting of T i, Zr, Nb, V, Hf, Ta, Mo, W, B, Al, and Ce;
• a (002)-oriented perovskite conductive oxide layer made of ABO3;
• an oxide layer having a (001)-oriented NaCl structure and containing at least one element selected from the group consisting of Mg, AI, and Ce;
• and
• a layer having a (001)-oriented tetragonal or cubic structure and containing at least one element selected from the group consisting of Al, Cr, Fe, Co, Rh, Pd, Ag, Ir, Pt, Au, Mo, and W.