Resist composition and resist patterning process
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTakahiro Suzuki, Daisuke Domon, Masaaki Kotake, Keiichi Masunaga, Satoshi Watanabe
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Abstract
The present invention provides a resist composition, including: (A) a sulfonium salt containing an anion and a cation, the cation including a partial structure shown by the following general formula (A1); and (B) a polymer compound containing a repeating unit shown by the following general formula (B1). The present invention provides a resist composition that causes few defects and is excellent in lithography performance, having regulated acid diffusion, in photolithography using a high energy beam as a light source, and a resist patterning process using this resist composition.
Claims18
A resist composition, comprising:
- (A) a sulfonium salt containing an anion and a cation, the cation comprising:
- a partial structure shown by the following general formula (A1);
- and
- (B) a polymer compound containing a repeating unit shown by the following general formula (B1),
- wherein Rfa and Rfb each independently represent a fluoroalkyl group having 1 to 4 carbon atoms;
- RXa represents a hydrogen atom or an acid-labile group;
- Ra and Rb each independently represent a hydrogen atom or a monovalent hydrocarbon group having 1 to 10 carbon atoms optionally containing a hetero atom, Ra and Rb are optionally bonded with each other to form a ring together with the carbon atom to which Ra and Rb are bonded;
- A1a represents an ether bond or a thioether bond;
- L1a represents a single bond or a divalent linking group having 1 to 20 carbon atoms optionally containing a hetero atom;
- and * represents a bonding site;
- wherein “v” is 0 or 1;
- “w” is an integer of 0 to 2;
- RA represents any one of a hydrogen atom, a fluorine atom, a methyl group, and a trifluoromethyl group;
- each R11 independently represents a hydrogen atom, a halogen atom, a linear, branched, or cyclic acyloxy group having 2 to 8 carbon atoms optionally substituted with a halogen atom, a linear, branched, or cyclic alkyl group having 1 to 6 carbon atoms optionally substituted with a halogen atom, or a linear, branched, or cyclic alkoxy group having 1 to 6 carbon atoms optionally substituted with a halogen atom;
- A1 represents a single bond or a linear, branched, or cyclic alkylene group having 1 to 10 carbon atoms optionally having an ether bond between a carbon-carbon bond thereof;
- “a” is an integer satisfying 0≤a≤5+2w−b;
- and “b” is an integer of 1 to 3.
Dependencies are inferred from the claim text.