Laser processing device and operation checking method
AssigneeHamamatsu Photonics K.K.
InventorYasunori Igasaki
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AssigneeHamamatsu Photonics K.K.
InventorYasunori Igasaki
Estimating the term…
There is provided a laser processing device that includes a laser light source configured to output laser light, a spatial light modulator configured to modulate the laser light output from the laser light source according to a phase pattern and emit the modulated laser light, an objective lens configured to converge the laser light emitted from the spatial light modulator onto an object, a controller configured to control a phase pattern to be displayed on the spatial light modulator, and a determiner configured to determine whether operation of the spatial light modulator is normal, in which the controller performs switching control in which the phase pattern to be displayed on the spatial light modulator is switched, and the determiner makes the determination on the basis of a change in intensity of the laser light emitted from the spatial light modulator between before the switching control and after the switching control.
A laser processing device having at least a first mode in which an object is irradiated with laser light to perform laser processing and a second mode different from the first mode, the laser processing device comprising:
An operation checking method of a spatial light modulator of a laser processing device including a laser light source configured to output laser light, the spatial light modulator configured to modulate the laser light emitted from the laser light source according to a phase pattern and emit the laser light, and a converging lens configured to converge the laser light emitted from the spatial light modulator onto an object, the method comprising:
Dependencies are inferred from the claim text.