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US 11,128,105 B2Granted
Semiconductor laser device
AssigneeSharp Kabushiki Kaisha
InventorsTeruyoshi Takakura, Yoshimi Tanimoto, Yoshihiko Tani, Yuhzoh Tsuda
Life of this patent
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Abstract
In a semiconductor laser device, a semiconductor layer includes a first groove formed on both sides of a ridge, a pair of second recesses facing each other and between which the ridge is interposed on a side of a light emitting surface, and a pair of third grooves in parallel to the first groove from the light emitting surface and interposing the ridge therebetween.
Claims7
A semiconductor laser device in which a semiconductor layer, a dielectric film, and an electrode layer are stacked in this order,
- wherein the semiconductor layer is formed by stacking an n-type clad layer and a p-type clad layer in this order, and includes
- a ridge formed on the p-type clad layer and extending from one end to an other end in a direction laterally traversing the semiconductor layer, when viewed in a plan view,
- two first recesses, each of which is formed on both sides of the ridge along the laterally traversing direction,
- two groove-shaped second recesses having a depth reaching the n-type clad layer from the p-type clad layer and extending from each end in a direction longitudinally traversing the semiconductor layer to positions where the ridge is interposed between the two groove-shaped second recesses, when viewed in a plan view, and
- two groove-shaped third recesses having a depth reaching the n-type clad layer from the p-type clad layer, extending from the one end in the direction laterally traversing the semiconductor layer toward the second recesses in the laterally traversing direction when viewed in a plan view, and disposed at positions where the ridge is interposed between the two groove-shaped third recesses in the longitudinally traversing direction,
- the dielectric film covers at least a surface of the semiconductor layer other than the ridge, and
- the electrode layer overlaps the ridge and overlaps the dielectric film on an other end side from the second recesses in the laterally traversing direction when viewed in a plan view.
4 more elements
Dependencies are inferred from the claim text.