Method for scanning a sample by a charged particle beam system
AssigneeASML Netherlands B.V.
InventorsAdam Lyons, Thomas I. Wallow
Life of this patent
Estimating the term…
Abstract
A method for scanning a sample by a charged particle beam tool is provided. The method includes providing the sample having a scanning area including a plurality of unit areas, scanning a unit area of the plurality of unit areas, blanking a next unit area of the plurality of unit areas adjacent to the scanned unit area, and performing the scanning and the blanking the plurality of unit areas until all of the unit areas are scanned.
Claims15
A charged particle beam system comprising:
- a charged particle source;
- a scanning deflector to scan a charged particle beam emitted from the charged particle source on a scanning area of a sample, wherein the sample is determined to have a plurality of unit areas;
- a blanker for blanking the charged particle beam such that the charged particle beam no longer reaches the sample;
- and
- a controller includes circuitry for controlling the scanning deflector and the blanker,
- wherein the controller is configured to:
- scan a unit area of the plurality of unit areas;
- and
- blank a first unit area adjacent to the scanned unit area.
A non-transitory computer readable medium that stores a set of instructions that is executable by at least one processor of a computer system to cause the computer system to perform a method for service processing, the method comprising:
- providing a sample having a scanning area, wherein the sample is determined to have a plurality of unit areas;
- scanning a unit area of the plurality of unit areas with a charged particle beam;
- and
- blanking a unit area adjacent to the scanned unit area.
Dependencies are inferred from the claim text.