Device for measuring surface characteristics of a material
AssigneeImec Vzw
InventorsKristof Paredis, Umberto Celano, Wilfried Vandervorst
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AssigneeImec Vzw
InventorsKristof Paredis, Umberto Celano, Wilfried Vandervorst
Estimating the term…
A device is provided for electrically measuring surface characteristics of a sample. The device comprises at least one group of three electrodes: a first and second electrode spaced apart from each other and configured to be placed onto the surface of the sample, and a third electrode between the first two but isolated from these two electrodes by a one or more first insulators, wherein a second insulator further isolates the central electrode from the sample when the device is placed thereon. The three electrodes and the insulators are attached to a single or to multiple holders with conductors incorporated therein for allowing the coupling of the electrodes to power sources or measurement tools. The placement of the device onto a semiconductor sample creates a transistor with the sample surface acting as the channel. The device thereby allows the determination of the transistor characteristics of the sample in a straightforward way.
A device configured to electrically measure surface characteristics of a sample, the device comprising:
Dependencies are inferred from the claim text.