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US 11,125,771 B2Granted
Micromechanical z-inertial sensor
AssigneeRobert Bosch GmbH
InventorJochen Reinmuth
Life of this patent
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Abstract
A micromechanical z-inertial sensor includes a substrate; a movable seismic mass in a micromechanical functional layer; a torsion spring connected to the movable seismic mass and about which the seismic mass able to rotate; an electrode layer below the seismic mass and that, in an outer region is connectible to a potential of the substrate and is connected to the seismic mass via an insulating layer; and electrodes at a distance above and below an inner region of the electrode surface.
Claims6
A micromechanical z-inertial sensor comprising:
- a substrate;
- a movable seismic mass in a micromechanical functional layer;
- a torsion spring that is connected to the movable seismic mass and about which the seismic mass is able to rotate;
- an electrode layer that is below the seismic mass and that, in an outer region of the electrode layer, is connectible to a potential of the substrate and is connected to the seismic mass via an insulating layer;
- and
- electrodes situated at a distance above and below an inner region of the electrode layer.
3 more elements
Dependencies are inferred from the claim text.