# US 11,122,673 B2 · Compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source

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- Number: US 11,122,673 B2
- Document ID: US11122673B2
- Status: Granted
- Kind: B2
- Application number: 16/935,200
- Filed: 2020-07-22
- Published: 2021-01-28
- Granted: 2021-09-14
- Earliest claimed: 2019-07-22
- Assignees: University of Electronic Science and Technology of China
- Applicants: University of Electronic Science and Technology of China
- Inventors: Wenjie Fu; Chaoyang Zhang; Cong Nie; Xiaoyun Li; Yang Yan
- Web page: https://patentgrep.com/patent/US11122673B2

## CPC

- H05H 1/46: using applied electromagnetic fields, e.g. high frequency or microwave energy (H05H1/26 takes precedence)
- H05H 1/463: {using antennas or applicators}
- H05H 1/461: {Microwave discharges}
- H05H: PLASMA TECHNIQUE (apparatus or processes specially adapted for producing X-rays H05G2/00); PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS

## Abstract

A compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source includes an outer coaxial line, and an inner coaxial line arranged inside the outer coaxial line. The outer coaxial line includes a tube body. A metal tube is arranged in the tube body. A short-circuit plunger is arranged at the bottom of the metal tube. The inner coaxial line includes a needle electrode, and the needle electrode is arranged in the metal tube. A first gas inlet is arranged on the tube body, and the first gas inlet is connected between the tube body and the metal tube. A second gas inlet is arranged at the bottom of the metal tube, and the second gas inlet is connected between the metal tube and the needle electrode. The tube body is further provided with a microwave input port, and the microwave input port is connected to the metal tube.

## Claims

### Claim 1

A compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source, comprising an outer coaxial line and an inner coaxial line; wherein
the inner coaxial line is arranged inside the outer coaxial line, and a top of the inner coaxial line is flush with a top of the outer coaxial line;
the outer coaxial line comprises a tube body; a metal tube is arranged in the tube body; a short-circuit plunger is movably arranged at a bottom of the metal tube;
the inner coaxial line comprises a needle electrode; the needle electrode is arranged in the metal tube, and a top of the needle electrode protrudes out of the metal tube;
a first gas inlet is arranged on the tube body, and the first gas inlet is connected between the tube body and the metal tube; a second gas inlet is arranged at the bottom of the metal tube, and the second gas inlet is connected between the metal tube and the needle electrode;
the tube body is provided with a microwave input port, and the microwave input port is connected to the metal tube.

### Claim 2 (depends on 1)

The compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source of claim 1, wherein, the needle electrode comprises an upper metal cylinder and a lower metal cylinder; the lower metal cylinder is in electrical contact with the metal tube, and a surface of the lower metal cylinder is provided with a groove, wherein an air flow passes through the groove.

### Claim 3 (depends on 2)

The compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source of claim 2, wherein, a length of the upper metal cylinder is an integral multiple of ¼ of a wavelength at an operating frequency of the compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source.

### Claim 4 (depends on 2)

The compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source of claim 2, wherein, three V-shaped notches are uniformly provided on the surface of the lower metal cylinder.

### Claim 5 (depends on 1)

The compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source of claim 1, wherein, the top of the outer coaxial line is open.

### Claim 6 (depends on 1)

The compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source of claim 1, wherein, the needle electrode is 2 mm higher than the metal tube.

### Claim 7 (depends on 1)

The compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source of claim 1, wherein, each of the outer coaxial line and the inner coaxial line constitutes a coaxial transmission line with a characteristic impedance of 10-100 ohms.

### Claim 8 (depends on 1)

The compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source of claim 1, wherein, at least one gas selected from the group consisting of nitrogen, argon, oxygen, helium, hydrogen, carbon dioxide and methane is introduced into the first gas inlet and the second gas inlet of the compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source.

### Claim 9 (depends on 1)

The compound double coaxial line atmospheric pressure low-temperature microwave plasma jet source of claim 1, wherein, the tube body is made of brass.