# US 11,121,689 B2 · Sensor failure prediction system, sensor failure prediction method, physical quantity sensor, electronic apparatus, and vehicle

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- Number: US 11,121,689 B2
- Document ID: US11121689B2
- Status: Granted
- Kind: B2
- Application number: 16/824,133
- Filed: 2020-03-19
- Published: 2020-09-24
- Granted: 2021-09-14
- Earliest claimed: 2019-03-22
- Assignees: Seiko Epson Corporation
- Applicants: Seiko Epson Corporation
- Inventors: Chikara Nakayama
- Web page: https://patentgrep.com/patent/US11121689B2

## CPC

- G01C 19/5776: Signal processing not specific to any of the devices covered by groups G01C19/5607 - G01C19/5719
- H03F 3/45475: {using IC blocks as the active amplifying circuit}
- G01P 15/097: by vibratory elements
- G01P 21/00: Testing or calibrating of apparatus or devices covered by the preceding groups
- H03F 2203/45528: the FBC comprising one or more passive resistors and being coupled between the LC and the IC
- G01C: MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY (measuring liquid level G01F; radio navigation, determining distance or velocity by use of propagation effects, e.g. Doppler effects, propagation time, of radio waves, analogous arrangements using other waves G01S)
- H03F: AMPLIFIERS
- G01P: MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT (measuring or recording blood flow A61B5/02, A61B8/06; monitoring speed or deceleration of electrically-propelled vehicles B60L3/00; vehicle lighting systems adapted to indicate speed B60Q1/54; determining position or course in navigation, measuring ground distance in geodesy or surveying G01C; combined measuring devices for measuring two or more variables of movement G01C23/00; measuring velocity of sound G01H; measuring velocity of light G01J7/00; measuring direction or velocity of solid objects by reception or emission of radiowaves or other waves and based on propagation effects, e.g. Doppler effect, propagation time, direction of propagation, G01S; measuring speed of nuclear radiation G01T; measuring acceleration of gravity G01V; {measuring or recording the speed of trains B61L23/00; speed indicators incorporated in motor vehicles B60K35/00; measuring frequency or phase G01R; traffic control G08G})

## Abstract

A sensor failure prediction system is a sensor failure prediction system that predicts a failure of a physical quantity sensor including a vibrator element which is driven and vibrates by a drive signal and outputs a detection signal based on a physical quantity, and includes a memory that stores reference information on a reference value of the drive signal or the detection signal, and a processor that outputs prediction information on a stepwise or continuous state until the physical quantity sensor fails, based on signal information on a measurement value of the drive signal or the detection signal and the reference information.

## Claims

### Claim 1

A sensor failure prediction system that predicts a failure of a physical quantity sensor including a vibrator element which is driven and vibrates by a drive signal and outputs a detection signal based on a physical quantity, comprising:
a memory that stores reference information on a reference value of the drive signal or the detection signal; and
a processor that outputs prediction information on a stepwise or continuous state until the physical quantity sensor fails, based on signal information on a measurement value of the drive signal or the detection signal and the reference information.

### Claim 2 (depends on 1)

The sensor failure prediction system according to claim 1, wherein
the memory stores the reference information in advance.

### Claim 3 (depends on 1)

The sensor failure prediction system according to claim 1, wherein
the processor outputs the prediction information when the physical quantity sensor starts up.

### Claim 4 (depends on 1)

The sensor failure prediction system according to claim 1, wherein
the reference information includes information on a first range indicating a range for the reference value, and information on a second range indicating a range for the reference value in a range different from the first range, and
the processor outputs first prediction information when the measurement value is within the first range, and outputs second prediction information different from the first prediction information when the measurement value is within the second range.

### Claim 5 (depends on 1)

The sensor failure prediction system according to claim 1, wherein
the measurement value is a voltage value of the drive signal.

### Claim 6 (depends on 1)

The sensor failure prediction system according to claim 1, wherein
the measurement value is a resistance value based on a current value of the drive signal.

### Claim 7 (depends on 1)

The sensor failure prediction system according to claim 1, wherein
the physical quantity sensor has a package in which the vibrator element is contained, and
the prediction information includes information on prediction of a failure due to a degree of vacuum in the package.

### Claim 8

A sensor failure prediction method of predicting a failure of a physical quantity sensor including a vibrator element which is driven and vibrates by a drive signal and outputs a detection signal based on a physical quantity, comprising:
acquiring signal information on a measurement value of the drive signal or the detection signal; and
outputting prediction information on a stepwise or continuous state until the physical quantity sensor fails based on the signal information and reference information on a reference value of the drive signal or the detection signal.

### Claim 9 (depends on 8)

The sensor failure prediction method according to claim 8, wherein
the prediction information is output when the physical quantity sensor starts up.

### Claim 10 (depends on 8)

The sensor failure prediction method according to claim 8, wherein
the reference information includes information on a first range indicating a range for the reference value, and information on a second range indicating a range for the reference value in a range different from the first range, and
first prediction information is output when the measurement value is within the first range, and second prediction information different from the first prediction information is output when the measurement value is within the second range.

### Claim 11 (depends on 8)

The sensor failure prediction method according to claim 8, wherein
the measurement value is a voltage value of the drive signal.

### Claim 12 (depends on 8)

The sensor failure prediction method according to claim 8, wherein
the measurement value is a resistance value based on a current value of the drive signal.

### Claim 13 (depends on 8)

The sensor failure prediction method according to claim 8, wherein
the physical quantity sensor has a package in which the vibrator element is contained, and
the prediction information includes information on prediction of a failure due to a degree of vacuum in the package.

### Claim 14

A physical quantity sensor comprising:
a vibrator element that is driven and vibrates by a drive signal and outputs a detection signal based on a physical quantity;
a memory that stores reference information on a reference value of the drive signal or the detection signal; and
a processor that outputs prediction information on a stepwise or continuous state until the physical quantity sensor fails, based on signal information on a measurement value of the drive signal or the detection signal and the reference information.

### Claim 15 (depends on 1)

An electronic apparatus comprising:
the sensor failure prediction system according to claim 1.

### Claim 16 (depends on 1)

A vehicle comprising:
the sensor failure prediction system according to claim 1.
