# US 11,115,767 B2 · Diaphragm structure and method of manufacturing the same > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,115,767 B2 - Document ID: US11115767B2 - Status: Granted - Kind: B2 - Application number: 16/186,429 - Filed: 2018-11-09 - Published: 2020-02-27 - Granted: 2021-09-07 - Earliest claimed: 2018-08-24 - Assignees: National Taiwan University of Science and Technology - Applicants: National Taiwan University of Science and Technology - Inventors: Jinn P. Chu; Chia-Chi Yu; Bo-Zhang Lai; Chun-Tao Chen - Web page: https://patentgrep.com/patent/US11115767B2 ## CPC - H04R 31/003: {for diaphragms or their outer suspension} - H04R 7/125: {comprising a plurality of superposed layers in contact} - H04R 7/127: {dome-shaped} - H04R 2307/023: Diaphragms comprising ceramic-like materials, e.g. pure ceramic, glass, boride, nitride, carbide, mica and carbon materials - H04R 2307/025: Diaphragms comprising polymeric materials - H04R 2307/027: Diaphragms comprising metallic materials - H04R: LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; ELECTRIC HEARING AIDS; PUBLIC ADDRESS SYSTEMS (producing sounds with frequency not determined by supply frequency G10K) ## Abstract A diaphragm structure is used for an audio signal output device. The diaphragm structure includes a film substrate, a polymer fiber structure and a thin film metallic glass. The film substrate includes a first surface and a second surface opposite to the first surface. The polymer fiber structure is combined with the first surface of the film substrate. The thin film metallic glass is formed on at least a part of the second surface of the film substrate. ## Claims ### Claim 1 A diaphragm structure for an audio signal output device, the diaphragm structure comprising: a film substrate comprising a first surface and a second surface opposite to the first surface; a polymer fiber structure combined with the first surface of the film substrate; and a thin film metallic glass formed on at least a part of the second surface of the film substrate, wherein an absorbable energy of the diaphragm structure under stress ranges from 23*10−12 joule to 44*10−12 joule. ### Claim 2 (depends on 1) The diaphragm structure of claim 1, wherein a metallic glass target is deposited on the second surface of the film substrate by magnetron sputtering to form the thin film metallic glass. ### Claim 3 (depends on 1) The diaphragm structure of claim 1, wherein the film substrate further comprises a dome and an outer edge around the dome, the dome is protruded from the second surface, and the thin film metallic glass is formed on the dome. ### Claim 4 (depends on 3) The diaphragm structure of claim 3, wherein the thin film metallic glass is formed on the dome and the outer edge. ### Claim 5 (depends on 1) The diaphragm structure of claim 1, wherein the thin film metallic glass comprises an iron-based metallic glass material, a zirconium-based metallic glass material or a copper-based metallic glass material. ### Claim 6 (depends on 5) The diaphragm structure of claim 5, wherein the iron-based metallic glass material comprises a FeaTibCocNidBeNbf alloy, wherein a is 65±10 at %, b is 13±5 at %, c is 8±5 at %, d is 7±5 at %, e is 6±5 at % and f is 1±5 at %, and wherein a, b, c, d, e and f represent integers greater than or equal to 1 and a+b+c+d+e+f=100. ### Claim 7 (depends on 5) The diaphragm structure of claim 5, wherein the zirconium-based metallic glass material comprises a ZraCubAlcTad alloy, wherein a is 55±10 at %, b is 30±5 at %, c is 10±5 at % and d is 10±5 at %, and wherein a, b, c and d represent integers greater than or equal to 1 and a+b+c+d=100. ### Claim 8 (depends on 5) The diaphragm structure of claim 5, wherein the copper-based metallic glass material comprises a CuaZrbAlcTid alloy, wherein a is 55±10 at %, b is 30±5 at %, c is 10±5 at % and d is 10±5 at %, and wherein a, b, c and d represent integers greater than or equal to 1 and a+b+c+d=100. ### Claim 9 (depends on 1) The diaphragm structure of claim 1, wherein the thin film metallic glass has a thickness of 250 nm to 10 mm. ### Claim 10 (depends on 1) The diaphragm structure of claim 1, having a rigidity of 34 N/m to 36 N/m. ### Claim 11 (depends on 1) The diaphragm structure of claim 1, wherein when an audio signal having a frequency of between 8 kHz and 10 kHz is outputted, an oscillation amplitude of a sound pressure level produced by the diaphragm structure is maintained at below 5 dB. ### Claim 12 (depends on 1) The diaphragm structure of claim 1, wherein when an audio signal having a frequency of between 40 Hz and 1.5 kHz is outputted, a sound pressure level produced by the diaphragm structure is maintained within a range defined by a stable value±1 dB. ### Claim 13 A method of manufacturing a diaphragm structure, comprising: providing a film substrate comprising a first surface and a second surface opposite to the first surface; combining a polymer fiber structure with the first surface of the film substrate; and sputtering a metallic glass target on at least a part of the second surface of the film substrate to form a thin film metallic glass, wherein the thin film metallic glass comprises an iron-based metallic glass material, a zirconium-based metallic glass material or a copper-based metallic glass material, wherein the iron-based metallic glass material comprises a FeaTibCocNidBeNbf alloy, wherein a is 65±10 at %, b is 13±5 at %, c is 8±5 at %, d is 7±5 at %, e is 6±5 at % and f is 1±5 at %, and wherein a, b, c, d, e and f represent integers greater than or equal to 1 and a+b+c+d+e+f=100.