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US 11,114,929 B2Granted
MEMS device
AssigneeGoogle Inc.
InventorsJulien Gamet, Faouzi Khechana, Nicolas Abele
Life of this patent
Estimating the term…
Abstract
According to the present invention there is provided a device comprising a MEMS die and, a single magnet, wherein the MEMS die cooperates with the magnet, such that the MEMS die is submerged in a magnetic field provided by the magnet; wherein the magnet is a single multi-pole magnet.
Claims13
A device comprising:
- a single magnet comprising a first portion having a first direction of magnetization and a second portion having a second direction of magnetization, the magnet at least partially forming a recess between the first portion and the second portion, the magnet to generate a magnetic field from the first portion to the second portion across the recess;
- and
- a MEMS die coupled to the magnet, the MEMS die at least partially positioned within the recess and partially surrounded by the magnet, the MEMS die comprising a MEMS mirror and an actuation coil, the MEMS mirror comprising a reflective surface, the MEMS mirror being responsive to operation of the actuation coil.
A device comprising:
- a magnet comprising a first magnetized region and a second magnetized region;
- a first MEMS die coupled to a first surface of the magnet, the first MEMS die comprising a first MEMS mirror and a first actuation coil, the first MEMS mirror comprising a first reflective surface, the first MEMS mirror being responsive to operation of the first actuation coil;
- and
- a second MEMS die coupled to a second surface of the magnet, the second MEMS die comprising a second MEMS mirror and a second actuation coil, the second MEMS mirror comprising a second reflective surface, the second MEMS mirror being responsive to operation of the second actuation coil.
1 more element
Dependencies are inferred from the claim text.