Method and apparatus for producing flexible OLED device including lift-off light irradiation

A method for producing a flexible OLED device, comprising:

• providing a multilayer stack which has a first surface and a second surface, the multilayer stack including
• a glass base which defines the first surface,
• a plurality of functional layer regions each including a TFT layer and an OLED layer,
• a synthetic resin film provided between the glass base and the plurality of functional layer regions and bound to the glass base, the synthetic resin film including a plurality of flexible substrate regions respectively supporting the plurality of functional layer regions and an intermediate region surrounding the plurality of flexible substrate regions, and
• a protection sheet which covers the plurality of functional layer regions and which defines the second surface;
• dividing the intermediate region and respective ones of the plurality of flexible substrate regions of the synthetic resin film from one another;
• irradiating an interface between the plurality of flexible substrate regions of the synthetic resin film and the glass base with laser light;
• and
• separating the multilayer stack into a first portion and a second portion by increasing a distance from a stage to the glass base while the second surface of the multilayer stack is kept in contact with the stage,
• wherein the first portion of the multilayer stack includes a plurality of OLED devices which are in contact with the stage, and the plurality of OLED devices respectively include the plurality of functional layer regions and include the plurality of flexible substrate regions of the synthetic resin film, and
• the second portion of the multilayer stack includes the glass base and the intermediate region of the synthetic resin film,
• wherein the method further comprises, before bringing the second surface of the multilayer stack into contact with the stage, placing a suction sheet on the stage, the suction sheet having a plurality of openings,
• wherein the stage includes a porous plate on which the suction sheet is to be placed, and
• the suction sheet includes a first region which is to be in contact with the plurality of OLED devices and a second region which is to face the intermediate region of the synthetic resin film, an aperture ratio of the first region being higher than an aperture ratio of the second region.