# US 11,114,611 B2 · Method to make MRAM with small footprint

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- Number: US 11,114,611 B2
- Document ID: US11114611B2
- Status: Granted
- Kind: B2
- Application number: 14/678,370
- Filed: 2015-04-03
- Published: 2016-10-06
- Granted: 2021-09-07
- Earliest claimed: 2015-04-03
- Applicants: Yimin Guo
- Inventors: Yimin Guo
- Web page: https://patentgrep.com/patent/US11114611B2

## CPC

- H10N 50/01: Manufacture or treatment
- H10B 61/00: Magnetic memory devices, e.g. magnetoresistive RAM [MRAM] devices
- H10N 50/10: Magnetoresistive devices
- H10N: ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10B: ELECTRONIC MEMORY DEVICES

## Abstract

A method to make magnetic random access memory with small footprint using O-ion implantation to form electrically isolated memory pillar and electric (bottom and top) leads, which are made from some oxygen gettering materials, Mg, Zr, Y, Th, Ti, Al, Ba. The doped O-ions react with metal atoms to form fully oxidized metal oxide after high temperature anneal. The method only needs two photolithography patterning and oxygen implantations and no etch and dielectric refill are needed, thus significantly reduce process cost. The method can produce extremely small MRAM cell size with perfectly vertical pillar edges (FIG. 1).

## Claims

### Claim 1

A method to make a high density magnetic random access memory (HDMRAM) comprising:
a deposition process of a magnetic tunnel junction (MTJ) multilayer film on a substrate surface connecting VIAs of select transistors of a control circuitry;
a doping process of oxygen gettering materials into the MTJ multilayer film;
a first photolithography patterning process to form a first hard mask in a first direction on the MTJ multilayer film;
a first oxygen ion implantation process to implant oxygen atoms into the MTJ multilayer film regions uncovered by the first hard mask;
a second photolithography patterning process to form a second hard mask in a second direction on the MTJ multilayer film;
a second oxygen ion implantation process to implant oxygen atoms into the MTJ multilayer film regions uncovered by the second hard mask;
a thermal annealing process for oxidizing and transforming the MTJ multilayer film regions uncovered by either the first hard mask or the second hard mask into electrical insulation regions on the substrate and forming small footprint MRAM elements covered by both the first hard mask and the second hard mask, and a high density MTJ array.

### Claim 2 (depends on 1)

The element of claim 1, wherein the MTJ multilayer film comprises:
a bottom electrode layer (BEL) atop the substrate surface;
a magnetic memory layer (MML) atop the BEL;
an MgO dielectric tunneling layer (DTL) atop the MML;
a magnetic reference layer (MRL) atop the DTL; and
a top electrode layer (TEL) atop the MRL.

### Claim 3 (depends on 1)

The element of claim 1, wherein the MTJ multilayer film comprises
a bottom electrode layer (BEL) atop the substrate surface;
a magnetic reference layer (MRL) atop the BEL;
an MgO dielectric tunneling layer (DTL) atop the MRL;
a magnetic memory layer (MML) atop the DTL;
an MgO intermediate layer (IL) atop the MML;
a cap layer (CL) atop the IL; and
a top electrode layer (TEL) provided on the surface of the CL.

### Claim 4 (depends on 2)

The element of claim 2, wherein the BEL and TEL comprise one or more of Mg, Zr, Y, Th, Ti, Al, and Ba, but preferably Mg.

### Claim 5 (depends on 2)

The element of claim 2, wherein the MML comprises one or more of CoFeB and CoFeB/CoFe.

### Claim 6 (depends on 2)

The element of claim 2, wherein the MRL comprises one or more of CoPt, CoPd, CoTb, FePt, FePd, FeTb, multi-layer of one or more of (Co/Pt)n and (Co/Pd)n.

### Claim 7 (depends on 1)

The element of claim 1, wherein said first ion mask comprises a first heavy atom material; said second ion mask comprises a second heavy atom material.

### Claim 8 (depends on 7)

The element of claim 7, wherein the first heavy atom material and the second heavy atom material comprise one or more of Ta and W.

### Claim 9 (depends on 3)

The element of claim 3, wherein the BEL and TEL comprise one or more of Mg, Zr, Y, Th, Ti, Al, and Ba, but preferably Mg.

### Claim 10 (depends on 3)

The element of claim 3, wherein the MML is comprises one or more of CoFeB and CoFeB/CoFe.

### Claim 11 (depends on 3)

The element of claim 3, wherein the MRL comprises one or more of CoPt, CoPd, CoTb, FePt, FePd, FeTb, multi-layer of one or more of (Co/Pt)n and (Co/Pd)n.

### Claim 12 (depends on 3)

The element of claim 3, wherein the CL comprises one or more of thin metal layers.

### Claim 13 (depends on 1)

The method of claim 1, wherein the high temperature anneal process comprises a thermal annealing of the HDMRAM in a vacuum to cure damages as side effects occurred during oxygen ion implantation with a high temperature for a time duration.

### Claim 14 (depends on 13)

The element of claim 13, wherein said high temperature of the high temperature anneal process is between 250 degrees C. to 800 degrees C.

### Claim 15 (depends on 13)

The element of claim 13, wherein said time duration of the high temperature anneal process is between 30 second to 30 minutes.