# US 11,114,534 B2 · Three-dimensional nor array including vertical word lines and discrete channels and methods of making the same

> Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt

- Number: US 11,114,534 B2
- Document ID: US11114534B2
- Status: Granted
- Kind: B2
- Application number: 16/728,825
- Filed: 2019-12-27
- Published: 2021-07-01
- Granted: 2021-09-07
- Earliest claimed: 2019-12-27
- Assignees: SanDisk Technologies LLC
- Applicants: Sandisk Technologies LLC
- Inventors: Adarsh Rajashekhar; Fei Zhou; Raghuveer S. Makala; Yanli Zhang; Rahul Sharangpani
- Web page: https://patentgrep.com/patent/US11114534B2

## CPC

- H10D 64/035: {comprising conductor-insulator-conductor-insulator-semiconductor structures}
- H10D 64/252: {for vertical or pseudo-vertical devices}
- H10B 41/27: the channels comprising vertical portions, e.g. U-shaped channels
- H10B 43/27: the channels comprising vertical portions, e.g. U-shaped channels
- H10B 51/20: characterised by the three-dimensional [3D] arrangements, e.g. with cells on different height levels
- H10D 30/6892: {having at least one additional gate other than the floating gate and the control gate, e.g. program gate, erase gate or select gate}
- H10D 30/696: {having at least one additional gate, e.g. program gate, erase gate or select gate}
- H10D 64/037: {comprising charge-trapping insulators}
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10B: ELECTRONIC MEMORY DEVICES

## Abstract

A three-dimensional memory device includes an alternating stack of source layers and drain layers located over a substrate, memory openings vertically extending through the alternating stack, vertical word lines located in each one of the memory openings and vertically extending through each of the source layers and the drain layers of the alternating stack, vertical stacks of discrete semiconductor channels located in each one of the memory openings and contacting horizontal surfaces of a respective vertically neighboring pair of a source layer of the source layers and a drain layer of the drain layers, and vertical stacks of discrete memory material portions located in each one of the memory openings and laterally surrounding a respective one of the vertical word lines. Each memory material portion is laterally spaced from a respective one of the semiconductor channels by a respective gate dielectric layer.

## Claims

### Claim 1

A three-dimensional memory device, comprising:
an alternating stack of source layers and drain layers located over a substrate;
memory openings vertically extending through the alternating stack;
vertical word lines located in each one of the memory openings and vertically extending through each of the source layers and the drain layers of the alternating stack;
vertical stacks of discrete semiconductor channels located in each one of the memory openings and contacting horizontal surfaces of a respective vertically neighboring pair of a source layer of the source layers and a drain layer of the drain layers; and
vertical stacks of discrete memory material portions located in each one of the memory openings and laterally surrounding a respective one of the vertical word lines, wherein each memory material portion is laterally spaced from a respective one of the semiconductor channels by a respective gate dielectric layer.

### Claim 2 (depends on 1)

The three-dimensional memory device of claim 1, wherein:
the semiconductor channels are vertically separated from each other;
memory material portions are vertically separated from each other;
each of the source layers comprises a respective vertical stack of a doped semiconductor source layer and a metallic source layer; and
each of the drain layers comprises a respective vertical stack of a doped semiconductor drain layer and a metallic drain layer.

### Claim 3 (depends on 2)

The three-dimensional memory device of claim 2, further comprising semiconductor oxide spacers laterally contacting a respective one of the source layers and the drain layers and contacting a respective one of the discrete semiconductor channels.

### Claim 4 (depends on 3)

The three-dimensional memory device of claim 3, wherein:
each semiconductor oxide spacer within a first subset of the semiconductor oxide spacers contacts a respective doped semiconductor source layer and a respective metallic source layer; and
each semiconductor oxide spacer within a second subset of the semiconductor oxide spacers contacts a respective doped semiconductor drain layer and a respective metallic drain layer.

### Claim 5 (depends on 3)

The three-dimensional memory device of claim 3, wherein each of the semiconductor oxide spacers comprises:
a vertically extending portion that contacts a vertical stack of a doped semiconductor source layer and a metallic source layer or a vertical stack of a doped semiconductor drain layer and a metallic drain layer; and
a laterally extending portion that contacts the respective one of the semiconductor channels.

### Claim 6 (depends on 5)

The three-dimensional memory device of claim 5, wherein:
the vertically extending portion comprises:
a first vertically extending segment that adjoins the laterally extending portion and contacts the doped semiconductor source layer or the doped semiconductor drain layer; and
a second vertically extending segment that is spaced from the laterally extending portion by the first vertically extending segment and contacts the metallic source layer or the metallic drain layer; and
the first vertically extending segment has a lateral thickness that is the same as a vertical thickness of the laterally extending portion and is less than a lateral thickness of the second vertically extending segment.

### Claim 7 (depends on 1)

The three-dimensional memory device of claim 1, wherein each of the gate dielectric layers vertically extends continuously through each level of the source layers and the drain layers within the alternating stack.

### Claim 8 (depends on 1)

The three-dimensional memory device of claim 1, wherein each of the gate dielectric layers comprises a discrete gate dielectric layer which contacts a respective one of the semiconductor channels, has a respective vertical extent that is not greater than a vertical extent of the respective one of the semiconductor channels.

### Claim 9 (depends on 1)

The three-dimensional memory device of claim 1, further comprising insulating layers interlaced with the source layers and the drain layers of the alternating stack, wherein the insulating layers comprise:
channel-level insulating layers in contact with a respective one of the semiconductor channels; and
inter-transistor-level insulating layers located between vertically neighboring pairs of the channel-level insulating layers and not contacting any of the semiconductor channels.

### Claim 10 (depends on 9)

The three-dimensional memory device of claim 9, wherein the channel-level insulating layers comprise a dielectric encapsulation layer that embeds a respective encapsulated cavity that is free of any solid phase material.

### Claim 11 (depends on 9)

The three-dimensional memory device of claim 9, wherein:
the channel-level insulating layers comprise a doped semiconductor oxide material; and
the inter-transistor-level insulating layers comprise a semiconductor oxide material having an etch rate in 100:1 dilute hydrofluoric acid at room temperature that is less than 30% of an etch rate of the doped semiconductor oxide material in 100:1 dilute hydrofluoric acid at room temperature.

### Claim 12 (depends on 1)

The three-dimensional memory device of claim 1, wherein the memory material portions comprise charge trapping material portions or floating gate structures that are laterally spaced from a most proximal one of the vertical word lines by a respective blocking dielectric layer.

### Claim 13 (depends on 1)

The three-dimensional memory device of claim 1, wherein the memory material portions comprise ferroelectric material portions that contact a most proximal one of the vertical word lines.

### Claim 14

A method of forming a three-dimensional memory device, comprising:
forming a vertical repetition of a unit layer stack that comprises a doped semiconductor source layer, a channel-level spacer layer, a doped semiconductor drain layer, and an inter-transistor-level insulating layer over a substrate;
forming memory openings vertically extending through the vertical repetition;
forming a vertical stack of channel cavities around each of the memory openings by laterally recessing the channel-level spacer layers relative to the doped semiconductor source layers, the doped semiconductor drain layers, and the inter-transistor-level insulating layers;
forming semiconductor oxide spacers by oxidizing surface portions of at least the doped semiconductor source layers and the doped semiconductor drain layers;
forming a semiconductor channel and a memory material portion within each of the channel cavities; and
forming a vertical word line in each of the memory openings.

### Claim 15 (depends on 14)

The method of claim 14, wherein:
the unit layer stack further comprises a source sacrificial material layer contacting the doped semiconductor source layer and vertically spaced from the channel-level spacer layer, and a drain sacrificial material layer contacting the doped semiconductor drain layer and vertically spaced from the channel-level spacer layer; and
the method further comprises replacing the source sacrificial material layers and the drain sacrificial material layers with metallic source layers and metallic drain layers, respectively.

### Claim 16 (depends on 15)

The method of claim 15, wherein the semiconductor oxide spacers are formed by oxidizing surface portions of the source sacrificial material layers and the drain sacrificial material layers in addition to the surface portions of the doped semiconductor source layers and the doped semiconductor drain layers.

### Claim 17 (depends on 16)

The method of claim 16, wherein:
the source sacrificial material layers and the drain sacrificial material layers comprise silicon nitride; and
each of the semiconductor oxide spacers comprises a first vertically extending segment formed by oxidation of a surface portion of a respective one of the doped semiconductor source layers and the doped semiconductor drain layers, and a second vertically extending segment formed by oxidation of a surface portion of a respective one of the source sacrificial material layers and the drain sacrificial material layers and having a thickness that is different from a thickness of the first vertically extending segment.

### Claim 18 (depends on 14)

The method of claim 14, further comprising forming a gate dielectric layer on each of the semiconductor channels, wherein each of the memory material portions is formed on a respective one of the gate dielectric layers.

### Claim 19 (depends on 14)

The method of claim 14, wherein:
the memory material portions comprise charge trapping material portions or floating gate structures;
the method further comprises forming a blocking dielectric layer on each of the memory material portions; and
each of the vertical word lines is formed on a respective blocking dielectric layer.

### Claim 20 (depends on 14)

The method of claim 14, wherein:
the memory material portions comprise ferroelectric material portions; and
each of the vertical word lines is formed on a respective vertical stack of ferroelectric material portions of the ferroelectric material portions.