Semiconductor package structure with twinned copper
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJung-Hua Chang, Po-Hao Tsai, Jing-Cheng Lin
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsJung-Hua Chang, Po-Hao Tsai, Jing-Cheng Lin
Estimating the term…
A semiconductor package structure is provided. The semiconductor package structure includes a chip structure. The semiconductor package structure includes a first conductive structure over the chip structure. The first conductive structure is electrically connected to the chip structure. The first conductive structure includes a first transition layer over the chip structure; a first conductive layer on the first transition layer; and a second conductive layer over the first conductive layer. The first conductive layer is substantially made of twinned copper. A first average roughness of a first top surface of the second conductive layer is less than a second average roughness of a second top surface of the first conductive layer.
A semiconductor package structure, comprising:
A semiconductor package structure, comprising:
A semiconductor package structure, comprising:
Dependencies are inferred from the claim text.