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US 11,114,356 B2Granted
Glass substrate and laminated substrate
AssigneeAGC Inc.
InventorsYu Hanawa, Shigeki Sawamura, Shuhei Nomura, Kazutaka Ono, Nobuhiko Takeshita, Keisuke Hanashima
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Abstract
The present invention provides a glass substrate in which in a step of sticking a glass substrate and a silicon-containing substrate to each other, bubbles hardly intrude therebetween. The present invention relates to a glass substrate for forming a laminated substrate by lamination with a silicon-containing substrate, having a warpage of 2 μm to 300 μm, and an inclination angle due to the warpage of 0.0004° to 0.12°.
Claims15
A glass substrate, comprising a glass having a density of from 2.40 g/cm3 to 2.60 g/cm3;
- wherein
- the glass substrate has a circular shape,
- a value W/D of warpage W (unit:
- μm) divided by the diameter D (unit:
- inch) of the circular glass substrate is from 1 to 13,
- the glass substrate has a warpage of 2 μm to 300 μm,
- a maximum local inclination angle due to the warpage of the glass substrate is from 0.0004° to 0.12°, and
- a thickness deviation of the glass substrate is from 2.5 μm to 15 μm.
5 more elements
Dependencies are inferred from the claim text.