# US 11,114,330 B2 · Substrate support having customizable and replaceable features for enhanced backside contamination performance > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,114,330 B2 - Document ID: US11114330B2 - Status: Granted - Kind: B2 - Application number: 16/549,239 - Filed: 2019-08-23 - Published: 2020-02-27 - Granted: 2021-09-07 - Earliest claimed: 2018-08-24 - Assignees: Axcelis Technologies, Inc. - Applicants: Axcelis Technologies, Inc. - Inventors: John Baggett; Dave Shaner - Web page: https://patentgrep.com/patent/US11114330B2 ## CPC - H10P 72/72: using electrostatic chucks - H10P 72/7614: {characterised by a plurality of individual support members, e.g. support posts or protrusions} - H10P 72/0434: {mainly by convection} - H10P 72/0602: {Temperature monitoring} - H10P 72/0616: {Monitoring of warpages, curvatures, damages, defects or the like} - H10P 72/722: {Details of electrostatic chucks} - H10P 72/7611: {characterised by edge profile or support profile} - H10P 72/7616: {characterised by a coating, a hardness or a material} - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 ## Abstract A workpiece support has a support surface where one or more standoffs are selectively removably coupled to the support surface. The one or more standoffs are operable to support a workpiece at a predetermined standoff distance from the support surface. A gap may be defined between the support surface and the workpiece. The one or more standoffs may be an electrically insulative film, such as a polyimide film that is selectively removably coupled to the support surface by an adhesive. The workpiece support may be an electrostatic chuck (ESC). Electrodes positioned below the support surface may electrostatically attract the workpiece toward the support, where a gas may be introduced in the gap. ## Claims ### Claim 1 A workpiece support, comprising: an electrostatic chuck (ESC) having a support surface; and one or more standoffs selectively removably coupled to the support surface, wherein the one or more standoffs are operable to support a workpiece at a predetermined standoff distance from the support surface. ### Claim 2 (depends on 1) The workpiece support of claim 1, wherein the one or more standoffs define a gap between the support surface and the workpiece. ### Claim 3 (depends on 2) The workpiece support of claim 2, wherein the electrostatic chuck comprises one or more electrodes positioned below the support surface, wherein the one or more electrodes are operable to electrostatically attract the workpiece toward the support surface based, at least in part, on an electrical voltage or current applied to the one or more electrodes. ### Claim 4 (depends on 3) The workpiece support of claim 3, wherein the support surface is electrically insulative. ### Claim 5 (depends on 2) The workpiece support of claim 2, wherein the electrostatic chuck comprises one or more gas orifices associated with the support surface, wherein the one or more gas orifices are fluidly coupled to the gap. ### Claim 6 (depends on 5) The workpiece support of claim 5, further comprising a gas source operable to supply a gas to the gap between the workpiece and support surface via the one or more gas orifices. ### Claim 7 (depends on 1) The workpiece support of claim 1, wherein the support surface is substantially planar and is devoid of protrusions extending therefrom. ### Claim 8 (depends on 1) The workpiece support of claim 1, wherein the support surface is substantially planar and comprises a plurality of mesas extending a protrusion distance from a planar region of the support surface, wherein the protrusion distance is less than the standoff distance. ### Claim 9 (depends on 1) The workpiece support of claim 1, wherein the one or more standoffs comprise a resilient material. ### Claim 10 (depends on 9) The workpiece support of claim 9, wherein the one or more standoffs comprise a non-metallic material. ### Claim 11 (depends on 1) The workpiece support of claim 1, wherein the one or more standoffs comprise an adhesive operable to selectively couple the one or more standoffs to the support surface. ### Claim 12 (depends on 11) The workpiece support of claim 11, wherein the adhesive comprises a silicone adhesive. ### Claim 13 (depends on 1) The workpiece support of claim 1, wherein the one or more standoffs comprise a polyimide film. ### Claim 14 (depends on 1) The workpiece support of claim 1, wherein the one or more standoffs comprise an electrically insulative film. ### Claim 15 (depends on 1) The workpiece support of claim 1, wherein the predetermined standoff distance is between approximately 0.001 inches and approximately 0.005 inches. ### Claim 16 (depends on 1) The workpiece support of claim 1, wherein the one or more standoffs are comprised of a material operable to withstand high temperatures ranging between approximately 50 C and approximately 600 C without substantial degradation or compression. ### Claim 17 (depends on 1) The workpiece support of claim 1, wherein the one or more standoffs are comprised of a material having a hardness that is less than a hardness of the workpiece. ### Claim 18 (depends on 1) The workpiece support of claim 1, wherein the one or more standoffs are formed in a predetermined shape when viewed perpendicular to the support surface, wherein the predetermined shape is one of a rounded shape, circular shape, ovular shape, polygonal shape, and a freeform shape. ### Claim 19 (depends on 1) The workpiece support of claim 1, wherein the one or more standoffs are positioned on the support surface based on predetermined criteria. ### Claim 20 (depends on 1) The workpiece support of claim 1, wherein the workpiece support comprises one or more of a thermal workpiece support operable to heat and/or cool the workpiece. ### Claim 21 A workpiece support, comprising: an electrostatic chuck (ESC) having a support surface; and one or more standoffs selectively coupled to the support surface, wherein the one or more standoffs are operable to support a workpiece at a predetermined standoff distance from the support surface, and wherein the one or more standoffs have a low thermal conductivity. ### Claim 22 A workpiece support, comprising: an electrostatic chuck (ESC) having a support surface; and one or more standoffs selectively coupled to the support surface, wherein the one or more standoffs are operable to support a workpiece at a predetermined standoff distance from the support surface, and wherein the one or more standoffs and the support surface have similar dielectric strengths. ### Claim 23 A workpiece support, comprising: an electrostatic chuck (ESC) having a support surface; and one or more standoffs selectively coupled to the support surface, wherein the one or more standoffs are operable to support a workpiece at a predetermined standoff distance from the support surface, and wherein the one or more standoffs are spaced along the support surface in a predetermined pattern, and wherein the one or more standoffs are initially defined on a transfer sheet, whereby the predetermined pattern is operable to be transferred from the transfer sheet to the support surface by placement of the transfer sheet on the support surface and selectively adhering the one or more standoffs from the transfer sheet to the support surface. ### Claim 24 A workpiece support, comprising: an electrostatic chuck (ESC) having a support surface; and one or more standoffs selectively coupled to the support surface, wherein the one or more standoffs are operable to support a workpiece at a predetermined standoff distance from the support surface, and wherein the one or more standoffs are initially comprised of a liquid that is applied to the support surface and subsequently cured on the support surface. ### Claim 25 A workpiece support, comprising: an electrostatic chuck (ESC) having a support surface; and one or more standoffs selectively coupled to the support surface, wherein the one or more standoffs are operable to support a workpiece at a predetermined standoff distance from the support surface, and wherein the one or more standoffs comprise a polyimide film. ### Claim 26 An electrostatic chuck comprising one or more removable standoffs operable to support a workpiece at a predetermined distance from a surface of the electrostatic chuck. ### Claim 27 (depends on 26) The electrostatic chuck of claim 26, wherein the one or more removable standoffs comprise an electrically insulative film, and wherein an adhesive selectively couples the electrically insulative film to the surface of the electrostatic chuck.