# US 11,114,318 B2 · Assembling apparatus and assembling method for semiconductor manufacturing apparatus > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,114,318 B2 - Document ID: US11114318B2 - Status: Granted - Kind: B2 - Application number: 16/394,140 - Filed: 2019-04-25 - Published: 2019-10-31 - Granted: 2021-09-07 - Earliest claimed: 2018-04-27 - Assignees: Tokyo Electron Limited - Applicants: Tokyo Electron Limited - Inventors: Hisashi Inoue; Masahiro Kobayashi; Michihiro Takahashi; Tamotsu Hatakeyama; Harunari Hasegawa; Hiroshi Kikuchi; Yoshihisa Kumagai - Web page: https://patentgrep.com/patent/US11114318B2 ## CPC - H10P 72/0434: {mainly by convection} - H10P 72/0462: {characterised by the construction of the processing chambers, e.g. modular processing chambers} - B23P 19/10: Aligning parts to be fitted together - H10P 72/0402: {Apparatus for fluid treatment (H10P72/0441, H10P72/0448 take precedence)} - H10P 72/12: {Vertical boat type carrier whereby the substrates are horizontally supported, e.g. comprising rod-shaped elements} - H10P 72/3214: {by means of a cart or a vehicle} - H10P 72/3312: {Vertical transfer of a batch of workpieces} - H10P 72/3408: {Docking arrangements} - B23P 19/04: for assembling or disassembling parts - H10P 72/00: Handling or holding of wafers, substrates or devices during manufacture or treatment thereof - H10P: GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10 - B23P: METAL-WORKING NOT OTHERWISE PROVIDED FOR; COMBINED OPERATIONS; UNIVERSAL MACHINE TOOLS (arrangements for copying or controlling B23Q) ## Abstract Provided is an assembling apparatus for a semiconductor manufacturing apparatus. The assembling apparatus includes: a body; lift attached to the body and configured to move a reaction tube having an opening at a lower end portion thereof vertically, thereby allowing a gas supply pipe to be installed inside the reaction tube through the opening while the reaction tube is held by the lift; gas supply source configured to supply a gas into the reaction tube through the gas supply pipe while the reaction tube is held by the lift; and an exhaust mechanism including a pump configured to exhaust an inside of the reaction tube through the opening, thereby performing a leakage test of the reaction tube while the reaction tube is held by the lift. ## Claims ### Claim 1 An assembling apparatus for a semiconductor manufacturing apparatus, the assembling apparatus comprising: a body; a lift attached to the body and configured to move a reaction tube having an opening at a lower end portion thereof vertically; a gas supply source configured to supply a gas into the reaction tube through the opening while the reaction tube is held by the lift; and an exhaust path including a pump configured to exhaust an inside of the reaction tube through the opening, thereby performing a leakage test of the reaction tube while the reaction tube is held by the lift. ### Claim 2 (depends on 1) The assembling apparatus of claim 1, further comprising: a cover configured to air-tightly close the opening of the reaction tube. ### Claim 3 (depends on 2) The assembling apparatus of claim 2, wherein the cover is connected to the gas supply source through a pipe. ### Claim 4 (depends on 2) The assembling apparatus of claim 2, wherein the reaction tube has a double tube structure including an inner tube and an outer tube. ### Claim 5 (depends on 4) The assembling apparatus of claim 4, wherein the lift includes: a guide that is fixed to the body and extends in a vertical direction; a first sub-lift that is attached to the guide to be movable vertically, and holds the outer tube; and a second sub-lift that is attached to the guide below the first sub-lift to be movable vertically, and holds the inner tube. ### Claim 6 (depends on 4) The assembling apparatus of claim 4, wherein the body includes a flange fixing portion that fixes and holds the outer tube, the lift includes: a guide that is fixed to the body and extends in a vertical direction; and a third sub-lift that is attached to the guide to be movable vertically, and holds the outer tube and the inner tube. ### Claim 7 (depends on 2) The assembling apparatus of claim 2, wherein the cover includes: a plate that air-tightly closes the opening of the reaction tube; and a gas port formed by penetrating the plate, wherein the gas supply introduces a gas into the reaction tube through the gas port, and the exhaust path exhausts the inside of the reaction tube through the gas port when performing the leakage test. ### Claim 8 (depends on 2) The assembling apparatus of claim 2, further comprising: a slide including a rail that is attached to the body, and moves the reaction tube in a horizontal direction such that the reaction tube is guided into body of the assembling apparatus or guided out from the body of the assembling apparatus. ### Claim 9 (depends on 8) The assembling apparatus of claim 8, wherein the body includes a positioning portion connected to a carriage that conveys the reaction tube. ### Claim 10 (depends on 1) The assembling apparatus of claim 1, further comprising: a slide including a rail that is attached to the body, and moves the reaction tube in a horizontal direction such that the reaction tube is guided into body of the assembling apparatus or guided out from the body of the assembling apparatus. ### Claim 11 (depends on 1) The assembling apparatus of claim 1, wherein a positioning portion connected to a carriage that conveys the reaction tube is formed in the body.