In-situ optical chamber surface and process sensor
AssigneeApplied Materials, Inc.
InventorsChuang-Chia Lin, Upendra Ummethala, Steven E. Babayan, Lei Lian
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Abstract
Embodiments disclosed herein include optical sensor systems and methods of using such systems. In an embodiment, the optical sensor system comprises a housing and an optical path through the housing. In an embodiment, the optical path comprises a first end and a second end. In an embodiment a reflector is at the first end of the optical path, and a lens is between the reflector and the second end of the optical path. In an embodiment, the optical sensor further comprises an opening through the housing between the lens and the reflector.
Claims20
An optical sensor system, comprising:
- a housing;
- an optical path through the housing, wherein the optical path comprises a first end and a second end;
- a reflector at the first end of the optical path;
- an opening through the housing between the second end of the optical path and the reflector, wherein the opening provides an unobstructed path through the housing;
- a light source optically coupled to the optical path, wherein the light source is a broad band light source;
- and
- a sensor optically coupled to the optical path.
A method for measuring a process condition or a chamber condition in a processing chamber, comprising:
- obtaining a reference signal, wherein obtaining the reference signal comprises:
- emitting electromagnetic radiation from a source outside of the chamber, wherein the electromagnetic radiation is propagated along an optical path between the source and a reflector in the chamber;
- reflecting the electromagnetic radiation back along the optical path with the reflector;
- and
- sensing the reflected electromagnetic radiation with a sensor that is optically coupled to the optical path;
- obtaining a process signal, wherein obtaining the process signal comprises:
- sensing electromagnetic radiation emitted in the processing chamber that travels along the optical path with the sensor;
- and
- comparing the process signal with the reference signal.
An optical sensing array for a plasma processing chamber, comprising:
- a plurality of optical sensing systems oriented around a perimeter of the processing chamber, wherein each of the plurality of optical sensing systems comprise:
- a housing;
- an optical path through the housing, wherein the optical path comprises a first end and a second end;
- a reflector at the first end of the optical path;
- an opening through the housing between the second end of the optical path and the reflector, wherein the opening provides an unobstructed path through the housing;
- and
- a light source optically coupled to the optical path, wherein the light source is a broad band light source;
- and
- a sensor optically coupled to the optical path.
An optical sensor system, comprising:
- a housing;
- an optical path through the housing, wherein the optical path comprises a first end and a second end;
- a reflector at the first end of the optical path;
- an opening through the housing between the second end of the optical path and the reflector, wherein the opening provides an unobstructed path through the housing;
- a light source optically coupled to the optical path;
- and
- a sensor optically coupled to the optical path, wherein the light source and the sensor are optically coupled to the optical path by a fiber optic cable.
An optical sensor system, comprising:
- a housing;
- an optical path through the housing, wherein the optical path comprises a first end and a second end;
- a reflector at the first end of the optical path;
- an opening through the housing between the second end of the optical path and the reflector, wherein the opening provides an unobstructed path through the housing;
- a light source optically coupled to the optical path;
- a sensor optically coupled to the optical path;
- and
- a band pass filter at a location along an optical path between the sensor and the opening.
An optical sensor system, comprising:
- a housing;
- an optical path through the housing, wherein the optical path comprises a first end and a second end;
- a reflector at the first end of the optical path;
- an opening through the housing between the second end of the optical path and the reflector, wherein the opening provides an unobstructed path through the housing;
- a light source optically coupled to the optical path;
- and
- a sensor optically coupled to the optical path, wherein the sensor is a spcetrometer or a photodiode.
Dependencies are inferred from the claim text.