# US 11,114,281 B2 · Method and device for radio frequency impedance matching, and semiconductor processing apparatus

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- Number: US 11,114,281 B2
- Document ID: US11114281B2
- Status: Granted
- Kind: B2
- Application number: 17/080,632
- Filed: 2020-10-26
- Published: 2021-04-01
- Granted: 2021-09-07
- Earliest claimed: 2018-04-27
- Assignees: Beijing Naura Microelectronics Equipment Co., Ltd.
- Applicants: Beijing Naura Microelectronics Equipment Co., Ltd.
- Inventors: Gang Wei; Jing Wei; Jing Yang
- Web page: https://patentgrep.com/patent/US11114281B2

## CPC

- H01J 37/32183: {Matching circuits}
- H01J 37/32: Gas-filled discharge tubes (heating by discharge H05B)
- H01J 37/32091: {the radio frequency energy being capacitively coupled to the plasma}
- H01J 37/321: {the radio frequency energy being inductively coupled to the plasma}
- H01J 37/32155: {Frequency modulation}
- H01J: ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS (spark-gaps H01T; electric arc lamps H05B31/00; particle accelerators H05H)

## Abstract

A method for radio frequency impedance matching includes performing frequency scanning matching using first n pulse phases of first m pulse periods as a frequency scanning stage, and from an (m+1)-th pulse period to an M-th pulse period, maintaining a frequency scanning parameter of a pulse phase corresponding to each frequency scanning stage of each pulse period. The radio frequency includes M pulse periods, each pulse period includes N pulse phases, M and N are integers greater than 1, m and n are integers greater than 0, m<M, n≤N, and i=1, 2, . . . , m. A start value of the frequency scanning parameter of each frequency scanning stage of an (i+1)-th pulse period is consistent with an end value of the frequency scanning parameter of each frequency scanning stage of the i-th pulse period. Accordingly, an end value of the frequency scanning parameter of each frequency scanning stage of an m-th pulse period matches a preset target value of the frequency scanning parameter.

## Claims

### Claim 1

A method for radio frequency (RF) impedance matching for a radio frequency including M pulse periods, each of the M pulse periods including N pulse phases, M and N being integers greater than 1, wherein the method comprises:
performing frequency scanning matching by using first n pulse phases of each of first m pulse periods as frequency scanning stages each corresponding to one of the first m pulse periods, a start value of a frequency scanning parameter of the frequency scanning stage of an (i+1)-th pulse period being consistent with an end value of the frequency scanning parameter of the frequency scanning stage of an i-th pulse period to make an end value of the frequency scanning parameter of the frequency scanning stage of an m-th pulse period to match a target value of the frequency scanning parameter, m and n being integers greater than 0, m<M, n≤N, and i=1, 2, . . . , m; and
maintaining the frequency scanning parameter of pulse phases, corresponding to the first n pulse phases, of each pulse period from an (m+1)-th pulse period to an M-th pulse period to be unchanged, the frequency scanning parameter of the pulse phases of each pulse period from the (m+1)-th pulse period to the M-th pulse period being consistent with the end value of the frequency scanning parameter of the frequency scanning stage of the m-th pulse period.

### Claim 2 (depends on 1)

The method according to claim 1, further comprising:
performing the frequency scanning matching on the frequency scanning stage of the i-th pulse period;
obtaining the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period;
determining whether the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period matches the target value of the frequency scanning parameter;
in response to the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period matching the target value of the frequency scanning parameter, maintaining the frequency scanning parameter of the pulse phases, corresponding to the first n pulse phases, of each pulse period from the (m+1)-th pulse period to the M-th pulse period to be unchanged; and
in response to the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period not matching the target value of the frequency scanning parameter, performing the frequency scanning matching on the frequency scanning stage of the (i+1)-th pulse period, the start value of the frequency scanning parameter of the frequency scanning stage of the (i+1)-th pulse period being consistent with the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period.

### Claim 3 (depends on 1)

The method according to claim 1, further comprising:
maintaining the frequency scanning parameter of the pulse phases, corresponding to the first n pulse phases, of an (m+j)-th pulse period to be unchanged, the frequency scanning parameter of the pulse phases of the (m+j)-th pulse period being consistent with the frequency scanning parameter of the frequency scanning stage of the m-th pulse period, j=1, 2, . . . , M-m-1;
acquiring an end value of the frequency scanning parameter of the frequency scanning stage of the (m+j)-th pulse period;
determining whether the end value of the frequency scanning parameter of the frequency scanning stage of the (m+j)-th pulse period matches the target value of the frequency scanning parameter;
in response to the end value of the frequency scanning parameter of the frequency scanning stage of the (m+j)-th pulse period matching the target value of the frequency scanning parameter, maintaining the frequency scanning parameter of pulse phases, corresponding to the first n pulse phases, of an (m+j+1)-th pulse period to be unchanged, the frequency scanning parameter of the pulse phases of the (m+j+1)-th pulse period being consistent with the frequency scanning parameter of the frequency scanning stage of the m-th pulse period, j=1, 2, . . . , M−m−1; and
the frequency scanning stages are first frequency scanning stages, and in response to the end value of the frequency scanning parameter of the frequency scanning stage of the (m+j)-th pulse period not matching the target value of the frequency scanning parameter, performing the frequency scanning matching by using first n pulse phases of k pulse periods following the (m+j)-th pulse period as second frequency scanning stages each corresponding to one of the k pulse periods, a start value of the frequency scanning parameter of the second frequency scanning stage of the (m+j+1)-th pulse period being consistent with an end value of the frequency scanning parameter of the second frequency scanning stage of the (m+j)-th pulse period to make an end value of the frequency scanning parameter of the second frequency scanning stage of an (m+j+k)-th pulse period to match the target value of the frequency scanning parameter, m and n being integers greater than 0, m<M, n≤N, and j+k=1, 2, . . . , M−m−1.

### Claim 4 (depends on 2)

The method according to claim 2, further comprising:
acquiring a reflected power of a radio frequency power supply after the frequency scanning stage of the i-th pulse period;
determining whether the reflected power matches a predetermined reflected power;
in response to the reflected power matching the predetermined reflected power, determining that the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period matches the target value of the frequency scanning parameter; and
in response to the reflected power not matching the predetermined reflected power, determining that the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period does not match the target value of the frequency scanning parameter.

### Claim 5 (depends on 1)

The method according to claim 1, further comprising:
in each pulse period, for pulse phases from an (n+1)-th pulse phase to an N-th pulse phase, performing matching by using frequency scanning to each of the pulse pulses or adjusting a capacitance of a matching device to make an output impedance of a RF power supply to match a load impedance, n<N.

### Claim 6 (depends on 1)

The method according to claim 1, wherein: N=3; n=1.

### Claim 7 (depends on 1)

The method according to claim 1, wherein: N=2; n=2.

### Claim 8 (depends on 1)

The method according to claim 1, wherein the frequency scanning parameter comprises at least one of: a frequency of the frequency scanning, a frequency scanning range, a frequency scanning speed, a frequency scanning accuracy, or a frequency scanning gain.

### Claim 9

A device for radio frequency (RF) impedance matching for a radio frequency including M pulse periods, each of the M pulse periods including N pulse phases, M and N being integers greater than 1, the device comprising one or more processors, individually or collectively, configured:
using first n pulse phases of each of first m pulse periods as frequency scanning stages each corresponding to one of the first m pulse periods to perform frequency scanning matching, a start value of a frequency scanning parameter of the frequency scanning stage of an (i+1)-th pulse period being consistent with an end value of the frequency scanning parameter of the frequency scanning stage of an i-th pulse period to make an end value of the frequency scanning parameter of the frequency scanning stage of an m-th pulse period to match a target value of the frequency scanning parameter, m and n being integers greater than 0, m<M, n≤N, and i=1, 2, . . . , m; and
maintaining the frequency scanning parameter of pulse phases, corresponding to the first n pulse phases, of each pulse period from an (m+1)-th pulse period to an M-th pulse period to be unchanged, the frequency scanning parameter of the pulse phases of each pulse period from the (m+1)-th pulse period to the M-th pulse period being consistent with the end value of the frequency scanning parameter of the frequency scanning stage of the m-th pulse period.

### Claim 10 (depends on 9)

The device according to claim 9, wherein the one or more processors are further configured for:
performing the frequency scanning matching on the frequency scanning stage of the i-th pulse period;
obtaining the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period;
determining whether the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period matches the target value of the frequency scanning parameter;
in response to the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period matching the target value of the frequency scanning parameter, maintaining the frequency scanning parameter of the pulse pulses, corresponding to the first n pulse phases, of each pulse period from the (m+1)-th pulse period to the M-th pulse period to be unchanged; and
in response to the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period not matching the target value of the frequency scanning parameter, and performing the frequency scanning matching on the frequency scanning stage of the (i+1)-th pulse period, the start value of the frequency scanning parameter of the frequency scanning stage of the (i+1)-th pulse period being consistent with the end value of the frequency scanning parameter of the frequency scanning stage of the i-th pulse period.

### Claim 11

A semiconductor processing apparatus, comprising a device for radio frequency (RF) impedance matching for a radio frequency including M pulse periods, each of the M pulse periods including N pulse phases, M and N being integers greater than 1, the device comprising one or more processors, individually or collectively, configured for:
using first n pulse phases of each of first m pulse periods as frequency scanning stages each corresponding to one of the first m pulse periods to perform frequency scanning matching, a start value of a frequency scanning parameter of the frequency scanning stage of an (i+1)-th pulse period being consistent with an end value of the frequency scanning parameter of the frequency scanning stage of an i-th pulse period to make an end value of the frequency scanning parameter of the frequency scanning stage of an m-th pulse period to match a target value of the frequency scanning parameter, m and n being integers greater than 0, m<M, n≤N, and i=1, 2, . . . , m; and
maintaining the frequency scanning parameter of a pulse phase pulse phases, corresponding to the first n pulse phase, of each pulse period from an (m+1)-th pulse period to an M-th pulse period to be unchanged, the frequency scanning parameter of the pulse phases of each pulse period from the (m+1)-th pulse period to the M-th pulse period being consistent with the end value of the frequency scanning parameter of the frequency scanning stage of the m-th pulse period.