Power supply device for plasma, plasma device, and method for controlling power supply device for plasma
AssigneeFuji Corporation
InventorShinji Takikawa
Life of this patent
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Abstract
A plasma power supply device includes an AC power supply configured to generate an AC voltage of a predetermined frequency for application to a pair of electrodes by way of a power supply harness which is replaceable partially or wholly to change a wiring length and which is flexible, and a control section configured to set the predetermined frequency of the AC power supply so that the frequency becomes lower as the power supply harness becomes longer.
Claims8
A plasma power supply device comprising:
- an AC power supply configured to generate an AC voltage of a predetermined frequency to be applied to a pair of electrodes configured to generate a plasma by way of an unshielded power supply harness that includes a pair of conductors constituting a core, each conductor being detachably coupled to a respective electrode from the pair of electrodes;
- and
- a control section configured to set the predetermined frequency of the AC power supply so that the frequency becomes lower as the power supply harness becomes longer,
- wherein the control section is further configured to (i) receive information indicating a wiring length of the power supply harness, and (ii) set the predetermined frequency of the AC power supply based on the wiring length of the power supply harness.
A plasma power supply device control method for controlling a plasma power supply device comprising an AC power supply configured to generate an AC voltage of a predetermined frequency for application to a pair of electrodes configured to generate a plasma by way of an unshielded power supply harness, the plasma power supply device control method comprising:
- a step of setting the predetermined frequency of the AC power supply so that the frequency becomes lower as the power supply harness becomes longer, wherein
- the power supply harness includes a pair of conductors constituting a core, each conductor being detachably coupled to a respective electrode from the pair of electrodes, and
- wherein the step of setting the predetermined frequency of the AC power supply includes (i) receiving information indicating a wiring length of the power supply harness, and (ii) setting the predetermined frequency of the AC power supply based on the wiring length of the power supply harness.
Dependencies are inferred from the claim text.