Apparatus, method, and program for processing and observing cross section, and method of measuring shape

A method of processing and observing a cross section that uses an apparatus for processing and observing the cross section, the apparatus including a sample bed holding a sample, a focused ion beam column irradiating the sample with a focused ion beam, an electron beam column irradiating the sample with an electron beam in a direction perpendicular to a direction of irradiation of direction of the focused ion beam, and an electron detector detecting secondary electrons or reflection electrons generated from the sample,

• the method comprising a template image-obtaining process, a cross section-processing and observing process and an image quality-correcting process,
• wherein the template image-obtaining process comprises:
• an irradiation position control process that controls irradiation positions of the focused ion beam and the electron beam based on first target irradiation position information which is information showing a first target irradiation position of beams on the sample, stored in a memory unit;
• a cross section-exposing process that exposes a cross section of the sample by irradiating the sample with the focused ion beam for the first target irradiation position that are controlled in the irradiation position control process;
• and
• a cross section image-obtaining process that obtains a cross section image of the cross section by irradiating the cross section with the electron beam for the first target irradiation position that is controlled in the irradiation position control process and stores the cross section image for the first target irradiation position in the memory unit as a reference image quality information which is information showing reference image quality of the cross-section image;
• wherein the cross section-processing and observing process exposes the cross section of the sample by irradiating a second target irradiation position which is an irradiation position next to the first target irradiation position of the sample with the focused ion beam and obtains the cross section image of the cross section by irradiating the cross section with the electron beam for the second target irradiation position,
• wherein the image quality-correcting process corrects an image quality of the cross section image in relation to the second target irradiation position based on the reference image quality information;
• and
• wherein the image quality of the cross section is at least one of brightness, contrast, or luminance of the cross section.

A computer-readable and non-transitory medium storing a program for processing and observing a cross section, the program performing,

• in a computer of an apparatus for processing and observing the cross section, the apparatus including a sample bed holding a sample, a focused ion beam column irradiating the sample with a focused ion beam, an electron beam column irradiating the sample with an electron beam in a direction perpendicular to a direction of irradiation of the focused ion beam, and an electron detector detecting secondary electrons or reflection electrons generated from the sample,
• a template image-obtaining process, a cross section-processing and observing process and an image quality-correcting process,
• wherein the template image-obtaining process comprises;
• an irradiation position control process that controls irradiation positions of the focused ion beam and the electron beam based on first target irradiation position information which is information showing a first target irradiation position of beams on the sample, stored in a memory unit;
• a cross section-exposing process that exposes a cross section of the sample by irradiating the sample with the focused ion beam for the first target irradiation position that are controlled in the irradiation position control process;
• and
• a cross section image-obtaining process that obtains a cross section image of the cross section by irradiating the cross section with the electron beam for the first target irradiation position that is controlled in the irradiation position control process and stores the cross section image for the first target irradiation position in the memory unit as a reference image quality information which is information showing reference image quality of the cross-section image;
• wherein the cross section-processing and observing process exposes the cross section of the sample by irradiating a second target irradiation position which is an irradiation position next to the first target irradiation position of the sample with the focused ion beam and obtains the cross section image of the cross section by irradiating the cross section with the electron beam for the second target irradiation position,
• wherein the image quality-correcting process corrects an image quality of the cross section image in relation to the second target irradiation position, based on the reference image quality information;
• and
• wherein the image quality of the cross section is at least one of brightness, contrast, or luminance of the cross section.