Sixth-order and above corrected STEM multipole correctors

A corrector for correcting axial aberrations in a charged particle system, the corrector comprising:

• a first primary multipole that generates a first primary multipole field when a first excitation is applied to the first primary multipole;
• a second primary multipole that generates a second primary multipole field when a second excitation is applied to the second primary multipole, wherein the second primary multipole is positioned between the first primary multipole and a lens which is a source of spherical aberration when used in the charged particle system, wherein the first primary multipole is not imaged onto the second primary multipole such that a combination fourth-order aberration is created;
• and
• a secondary multipole for correcting the fourth-order aberration and a sixth-order aberration, wherein the secondary multipole is positioned between the second primary multipole and the lens when used in the charged particle system.

A charged particle system comprising:

• a charged particle source configured to emit a charged particle beam toward a sample;
• an optical column configured to focus the charged particle beam onto the sample, wherein the optical column comprises a corrector for correcting axial aberrations of a lens which is a source of spherical aberration, the corrector comprising:
• a first primary multipole for generating a first primary multipole field when a first excitation is applied to the first primary multipole;
• a second primary multipole for generating a second primary multipole field when a second excitation is applied to the second primary multipole, wherein the second primary multipole is positioned between the first primary multipole and the lens, and wherein the first primary multipole is not imaged onto the second primary multipole such that a combination fourth-order aberration is created;
• and
• a secondary multipole for correcting the fourth-order aberration and a sixth-order aberration, wherein the secondary multipole is positioned between the second primary multipole and the lens.