Scanning magnet design with enhanced efficiency
AssigneeAxcelis Technologies, Inc.
InventorsBo Vanderberg, Edward Eisner
Life of this patent
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Abstract
A scanning magnet is positioned downstream of a mass resolving magnet of an ion implantation system and is configured to control a path of an ion beam downstream of the mass resolving magnet for a scanning or dithering of the ion beam. The scanning magnet has a yoke having a channel defined therein. The yoke is ferrous and has a first side and a second side defining a respective entrance and exit of the ion beam. The yoke has a plurality of laminations stacked from the first side to the second side, wherein at least a portion of the plurality of laminations associated with the first side and second side comprise one or more slotted laminations having plurality of slots defined therein.
Claims20
A scanning magnet for magnetically scanning an ion beam, the scanning magnet comprising:
- a yoke having a channel defined therein, the yoke having a first side and a second side defining a respective entrance and exit of the ion beam passing along a beam path through the channel, the yoke comprising a plurality of laminations stacked from the first side to the second side, and wherein at least a portion of the plurality of laminations associated with the first side and second side comprise one or more slotted laminations, wherein the one or more slotted laminations have a plurality of tines extending toward the channel, wherein a plurality of slots are defined between the plurality of tines;
- one or more liners positioned within the channel, wherein the one or more liners are comprised of graphite and generally isolate the yoke and scanner coil from the ion beam, wherein the one or more liners further comprise one or more liner slots defined therein, wherein the one or more liner slots extend generally perpendicular to the beam path and are configured to generally reduce eddy currents within the one or more liners;
- and
- a scanner coil comprising a first wire wrapped around the yoke.
An ion implantation system, comprising:
- an ion source configured to form an ion beam;
- a mass analyzer;
- and
- a scanning magnet configured to magnetically scan the ion beam, wherein the scanning magnet comprises:
- a yoke having a channel defined therein, the yoke having a first side and a second side defining a respect entrance and exit of an ion beam passing along a beam path through the channel, the yoke comprising a plurality of laminations stacked from the first side to the second side, and wherein at least a portion of the plurality of laminations associated with the first side and second side comprise one or more slotted laminations, wherein the one or more slotted laminations have a plurality of tines extending toward the channel, wherein a plurality of slots are defined between the plurality of tines;
- one or more liners positioned within the channel, wherein the one or more liners are comprised of graphite and generally isolate the yoke and scanner coil from the ion beam, wherein the one or more liners further comprise one or more liner slots defined therein, wherein the one or more liner slots are extend generally perpendicular to the beam path and are configured to generally reduce eddy currents within the one or more liners;
- and
- a scanner coil comprising at least a first wire wrapped around the yoke.
Dependencies are inferred from the claim text.