Resistive element and method of manufacturing the same
AssigneeFuji Electric Co., Ltd.
InventorTaichi Karino
Life of this patent
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AssigneeFuji Electric Co., Ltd.
InventorTaichi Karino
Estimating the term…
A resistive element includes: a semiconductor substrate; a field insulating film deposited on the semiconductor substrate; a plurality of resistive layers separately deposited on the field insulating film; an interlayer insulating film deposited to cover the field insulating film and the resistive layers; a pad-forming electrode deposited on the interlayer insulating film, and electrically connected to one edges of the resistive layers; a relay wire deposited on the interlayer insulating film separately from the pad-forming electrode, and including a first terminal electrically connected to another edges of the resistive layers and a second terminal provided so as to form an ohmic contact to the semiconductor substrate; and a rear surface electrode provided under the semiconductor substrate to form an ohmic contact to the semiconductor substrate, wherein the resistive element uses, as a resistor, an electric channel between the pad-forming electrode and the rear surface electrode.
A resistive element comprising:
A method of manufacturing a resistive element, comprising:
Dependencies are inferred from the claim text.