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US 11,114,117 B1Granted
Process for manufacturing magnetic head having a servo read transducer structure with dielectric gap liner and a data read transducer structure with an embedded wear layer between thin and thick shield portions
AssigneeInternational Business Machines Corporation
InventorsDavid Seagle, Robert Biskeborn, Calvin Shyhjong Lo
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Abstract
A method, in accordance with one aspect of the present invention, includes forming various layers of a data read transducer structure and of a lower shield layer of a servo read transducer structure in an array with the data read transducer structure in common fabrication steps. The formed dielectric layers of both read transducer structures, coupled with the unique shield structure of the data read transducer structure, work in concert to provide robust resistance to asperity-induced shorting while also lower smaller read gap thickness.
Claims25
A method, comprising:
- simultaneously forming a first lower shield layer of a data read transducer structure and a lower shield layer of a servo read transducer structure in an array with the data read transducer structure;
- simultaneously forming a first dielectric layer above each of the lower shield layers of both the data read transducer structure and the servo read transducer structure;
- forming a second lower shield layer above the first dielectric layer formed above the first lower shield layer of the data read transducer structure, the second lower shield layer being in magnetic communication with the first lower shield layer of the data read transducer structure;
- forming a lower lead layer above at least the first dielectric layer formed above the lower shield layer of the servo read transducer structure;
- forming a data sensor of the data read transducer structure above the second lower shield layer;
- forming a servo sensor of the servo read transducer structure above the lower lead layer;
- forming an upper lead layer above at least the servo sensor;
- forming a first upper shield layer above the data sensor;
- simultaneously forming a second dielectric layer above the first upper shield layer and the upper lead layer thereby forming the second dielectric layer above the servo sensor and the data sensor;
- and
- simultaneously forming a second upper shield layer above the upper lead layer and above the second dielectric layer positioned above the first upper shield layer, a portion of the second upper shield layer positioned above the data sensor being in magnetic communication with the first upper shield layer of the data read transducer structure.
8 more elements
A method, comprising:
- simultaneously forming a first lower shield layer of each data read transducer structure in an array of data read transducer structures and a lower shield layer of servo read transducer structures flanking the array data of read transducer structures in the same processing step;
- simultaneously forming a first dielectric layer above each of the lower shield layers of each of the data read transducer structures and each of the servo read transducer structures in the same processing step;
- forming a second lower shield layer above each first dielectric layer formed above the first lower shield layers of the data read transducer structures, the second lower shield layers being in magnetic communication with the respective first lower shield layers of the data read transducer structures;
- forming a lower lead layer above at least each first dielectric layer formed above the lower shield layer of each servo read transducer structure;
- forming a data sensor of each data read transducer structure above the second lower shield layer of the respective data read transducer structure;
- forming a servo sensor of each servo read transducer structure above the lower lead layer of the respective servo read transducer structure;
- forming an upper lead layer above at least each servo sensor;
- forming a first upper shield layer above each data sensor;
- simultaneously forming a second dielectric layer above each first upper shield layer and each upper lead layer in the same processing step, thereby forming the second dielectric layer above each of the servo sensors and each of the data sensors;
- and
- simultaneously forming a second upper shield layer above each upper lead layer and above each second dielectric layer positioned above the associated first upper shield layer in the same processing step, a portion of the respective second upper shield layer positioned above each data sensor being in magnetic communication with the first upper shield layer of the data read transducer structure.
8 more elements
Dependencies are inferred from the claim text.