# US 11,112,665 B2 · Wiring substrate and display device including wiring substrate

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- Number: US 11,112,665 B2
- Document ID: US11112665B2
- Status: Granted
- Kind: B2
- Application number: 16/276,529
- Filed: 2019-02-14
- Published: 2020-01-23
- Granted: 2021-09-07
- Earliest claimed: 2018-07-17
- Assignees: Samsung Display Co., Ltd.
- Applicants: Samsung Display Co., Ltd.
- Inventors: Ju Hyun Lee; Gyung Min Baek; Hyun Eok Shin; Hong Sick Park; Sang Won Shin
- Web page: https://patentgrep.com/patent/US11112665B2

## CPC

- G02F 1/136286: {Wiring, e.g. gate line, drain line}
- H10D 86/441: {Interconnections, e.g. scanning lines}
- H10D 86/60: wherein the TFTs are in active matrices
- G02F 1/136222: {Colour filters incorporated in the active matrix substrate}
- G02F 1/13629: {Multilayer wirings}
- G02F 1/136295: {Materials; Compositions; Manufacture processes}
- G02F 2201/38: Anti-reflection arrangements
- G02F: OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- H10D: INORGANIC ELECTRIC SEMICONDUCTOR DEVICES

## Abstract

A display device may include a first base, a metal oxide layer overlapping a face of the first base, and a conductive metal layer directly contacting the metal oxide layer. The metal oxide layer may include molybdenum oxide. A side of the metal oxide layer may be oriented at a first angle relative to the face of the first base. A side of the conductive metal layer may be oriented at a second angle relative to the face of the first base. A size of the second angle may be in a range of 30° to 75°.

## Claims

### Claim 1

A display device, comprising:
a first base;
a metal oxide layer overlapping a face of the first base;
a semiconductor material layer spaced from the metal oxide layer; and
a conductive metal layer directly contacting the metal oxide layer and spaced from the semiconductor material layer,
wherein the metal oxide layer includes molybdenum oxide and protrudes beyond the conductive metal layer in a direction parallel to the face of the substrate,
wherein a side of the metal oxide layer is oriented at a first angle relative to the face of the first base,
wherein a side of the conductive metal layer is oriented at a second angle relative to the face of the first base, and
wherein a size of the second angle is in a range of 30° to 75°.

### Claim 2 (depends on 1)

The display device of claim 1,
wherein a light reflectance of the metal oxide layer is lower than a light reflectance of the conductive metal layer.

### Claim 3 (depends on 2)

The display device of claim 2,
wherein a first wiring layer of the display device comprises the metal oxide layer and the conductive metal layer, and
wherein a light reflectance of the first wring layer to light having a wavelength of 550 nm incident from the face of the first base is 6.0% or less.

### Claim 4 (depends on 3)

The display device of claim 3,
wherein a maximum thickness of the metal oxide layer in a direction perpendicular to the face of the first base is in a range of 100 Å to 2000 Å.

### Claim 5 (depends on 1)

The display device of claim 1,
wherein the conductive metal layer includes a first metal layer and a second metal layer,
wherein the first metal layer is disposed between the metal oxide layer and the second metal layer, and
wherein the second metal layer has higher electrical conductivity than the first metal layer.

### Claim 6 (depends on 5)

The display device of claim 5,
wherein a first wiring layer of the display device comprises the metal oxide layer and the conductive metal layer, and
wherein a light reflectance of the first wring layer to light having a wavelength of 550 nm incident from the face of the metal oxide layer is 6.0% or less.

### Claim 7 (depends on 1)

The display device of claim 1,
wherein the conductive metal layer includes a first metal layer and a second metal layer, and
wherein the second metal layer is disposed between the first metal layer and the metal oxide layer and has higher electrical conductivity than the first metal layer.

### Claim 8 (depends on 7)

The display device of claim 7,
wherein a maximum thickness of the metal oxide layer in a direction perpendicular to the face of the first base is greater than a maximum thickness of the first metal layer in the direction perpendicular to the face of the first base and is smaller than a maximum thickness of the second metal layer in the direction perpendicular to the face of the first base.

### Claim 9 (depends on 8)

The display device of claim 8,
wherein the maximum thickness of the metal oxide layer in the direction perpendicular to the face of the first base is in a range of 100 Å to 2000 Å.

### Claim 10 (depends on 7)

The display device of claim 7,
wherein the first metal layer includes a refractory metal, and
wherein the second metal includes at least one of copper and silver.

### Claim 11 (depends on 7)

The display device of claim 7,
wherein a first face of the first metal layer and a first face of the second metal layer are positioned between a second face of the first metal layer and a second face of the second metal layer, and
wherein the first face of the first metal layer is wider that the first face of the second metal layer in the direction parallel to the face of the first base.

### Claim 12 (depends on 7)

The display device of claim 7,
wherein the metal oxide layer directly contacts a face of the conductive metal layer and protrudes beyond the face of the conductive metal layer in the direction parallel to the face of the first base.

### Claim 13 (depends on 1)

The display device of claim 1,
wherein a side of the conductive metal layer is oriented at an angle relative to the face of the first base and directly contacts a portion of a flat side of the metal oxide layer,
wherein the portion of the flat side of the metal oxide layer is positioned between two opposite sides of the metal oxide layer and is positioned between two opposite edges of the flat side of the metal oxide layer,
wherein each of the two opposite sides of the metal oxide layer is directly connected to the flat side of the metal oxide layer,
wherein the face of the first base is equidistant from the two opposite sides of the metal oxide layer, and
wherein a size of the angle is in a range of 30° to 75°.

### Claim 14

A display device, comprising:
a first base;
a metal oxide layer overlapping a face of the first base;
a semiconductor material layer overlapping the metal oxide layer and spaced from the metal oxide layer; and
a conductive metal layer directly contacting the metal oxide layer and spaced from the semiconductor material layer,
wherein the metal oxide layer includes molybdenum oxide,
wherein a side of the metal oxide layer is oriented at a first angle relative to the face of the first base,
wherein a side of the conductive metal layer is oriented at a second angle relative to the face of the first base,
wherein a size of the second angle is in a range of 30° to 75°, and
wherein the metal oxide layer is disposed directly on the first base and disposed between the conductive metal layer and the first base.

### Claim 15 (depends on 14)

The display device of claim 14,
wherein the first angle is smaller than the second angle.

### Claim 16 (depends on 15)

The display device of claim 15,
wherein the size of the second angle is in a range of 45° to 70°.

### Claim 17 (depends on 14)

The display device of claim 14,
wherein the metal oxide layer directly contacts a face of the conductive metal layer and protrudes beyond the face of the conductive metal layer in a direction parallel to the face of the first base.

### Claim 18 (depends on 14)

The display device of claim 14,
wherein the metal oxide layer further includes tantalum, and
wherein a content of the tantalum in metal atoms is in a range of 0.5 at % to 12 at % in the metal oxide layer.

### Claim 19 (depends on 14)

The display device of claim 14,
wherein the conductive metal layer includes a first metal layer and a second metal layer,
wherein the first metal layer is disposed between the metal oxide layer and the second metal layer, and
wherein the second metal layer has higher electrical conductivity than the first metal layer.

### Claim 20

A display device, comprising:
a first base;
a conductive metal layer overlapping a face of the first base; and
a metal oxide layer directly contacting the conductive metal layer,
wherein the metal oxide layer includes MoxTayOz,
wherein a side of the conductive metal layer is oriented at an acute angle relative to the face of the first base, and
wherein a content of tantalum in metal atoms is in a range of 0.5 at % to 20 at % in the metal oxide layer.