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US 11,112,543 B2Granted
Optical element having a coating for influencing heating radiation and optical arrangement
AssigneeCarl Zeiss SMT GmbH
InventorsBoris Bittner, Norbert Wabra, Holger Schmidt, Ricarda Schoemer, Sonja Schneider
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Abstract
The disclosure relates to an optical element, including: a substrate, a first coating, which is disposed on a first side of the substrate and is configured for reflecting radiation having a used wavelength (λEUV) in the EUV wavelength range, and a second coating, which is disposed on a second side of the substrate, for influencing heating radiation that is incident on the second side of the substrate. The disclosure also relates to an optical arrangement having at least one such optical element.
Claims20
An optical element, comprising:
- a substrate having first and second sides;
- a first coating supported by the first side of the substrate;
- and
- a second coating supported by the second side of the substrate,
- wherein:
- the substrate comprises a glass;
- the first coating reflects EUV radiation;
- the second coating transmits radiation at a first wavelength;
- the second coating comprises a member selected from the group consisting of an absorbing layer that absorbs radiation having a second wavelength and a transmitting layer that transmits radiation having the second wavelength;
- the first wavelength is in a range selected from the group consisting of the visible range and the infrared range;
- the second wavelength is in a range selected from the group consisting of the visible range and the infrared range;
- the second wavelength is different from the first wavelength;
- and
- the optical element is an EUV mirror.
11 more elements
Dependencies are inferred from the claim text.