# US 11,112,451 B2 · Test method for semiconductor devices and a test system for semiconductor devices > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,112,451 B2 - Document ID: US11112451B2 - Status: Granted - Kind: B2 - Application number: 16/296,954 - Filed: 2019-03-08 - Published: 2020-01-23 - Granted: 2021-09-07 - Earliest claimed: 2018-07-17 - Assignees: Samsung Electronics Co., Ltd. - Applicants: Samsung Electronics Co., Ltd. - Inventors: Chul-Min Lee; Tae-Kyung Ko; Jin-Seong Kim; Hyeong-Gon Son; Seung-Woo Hong; Dong-Gu Lee; Sang-Jae Rhee - Web page: https://patentgrep.com/patent/US11112451B2 ## CPC - G01R 31/2867: {Handlers or transport devices, e.g. loaders, carriers, trays} - G01R 31/2894: {Aspects of quality control [QC] (G01R31/31718 takes precedence; program control for QC G05B19/41875)} - G01R 31/31718: {Logistic aspects, e.g. binning, selection, sorting of devices under test, tester/handler interaction networks, Test management software, e.g. software for test statistics or test evaluation, yield analysis (mechanical aspects G01R31/2808, G01R31/2851)} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract A test method for a semiconductor device includes: loading a test tray having semiconductor devices of first and second lots arranged thereon into a test chamber; storing lot information of each of the semiconductor devices; performing a test program on each of the semiconductor devices; obtaining ID information of each of the semiconductor devices; matching the ID information with the lot information to generate lot sorting information; and sorting the semiconductor devices based on results of the test program and the lot sorting information. ## Claims ### Claim 1 A test method for a semiconductor device, comprising: loading a test tray having semiconductor devices of first and second lots arranged thereon into a test chamber; storing lot information of each of the semiconductor devices; performing a test program on each of the semiconductor devices of each of the first and second lots, wherein the first and second lots are tested together; obtaining ID information of each of the semiconductor devices; matching the ID information with the lot information to generate lot sorting information; and sorting the semiconductor devices based on results of the test program and the lot sorting information. ### Claim 2 (depends on 1) The test method for a semiconductor device of claim 1, wherein loading the test tray into the test chamber comprises: providing a tester handler with a first customer tray having the semiconductor devices of the first lot arranged thereon; providing the tester handler with a second customer tray having the semiconductor devices of the second lot arranged thereon; and moving the semiconductor devices on the first and second customer trays to the test tray. ### Claim 3 (depends on 2) The test method for a semiconductor device of claim 2, wherein the first customer tray is moved to a first loading stacker of the tester handler, and the second customer tray is moved to a second loading stacker of the tester handler. ### Claim 4 (depends on 2) The test method for a semiconductor device of claim 2, wherein sorting the semiconductor devices based on results of the test program and the lot sorting information comprises: moving the semiconductor devices which are determined to be non-defective according to the results of the test program and have the lot information of the first lot to a third customer tray; and moving the semiconductor devices which are determined to be non-defective according to the results of the test program and have the lot information of the second lot to a fourth customer tray. ### Claim 5 (depends on 4) The test method for a semiconductor device of claim 4, wherein sorting the semiconductor devices based on results of the test program and the lot sorting information further comprises moving the semiconductor devices which are determined to be defective according to the results of the test program and have the lot information of the first lot or the second lot to a fifth customer tray. ### Claim 6 (depends on 1) The test method for a semiconductor device of claim 1, wherein storing the lot information of each of the semiconductor devices comprises storing a lot number of each of the semiconductor devices in a tester server. ### Claim 7 (depends on 6) The test method for a semiconductor device of claim 6, wherein performing the test program on the semiconductor devices comprises transmitting the test program corresponding to the lot information from the tester server to a tester. ### Claim 8 (depends on 1) The test method for a semiconductor device of claim 1, wherein obtaining the ID information of each of the semiconductor devices comprises: reading the ID information of each of the semiconductor devices when the test program is performed by a tester; and transmitting the ID information from the tester to a tester server. ### Claim 9 (depends on 8) The test method for a semiconductor device of claim 8, wherein matching the ID information with the lot information comprises: mapping the ID information of a first semiconductor device to a lot number to which the first semiconductor device belongs; and storing the test results and the lot number as historical test data of the first semiconductor device. ### Claim 10 (depends on 1) The test method for a semiconductor device of claim 1, wherein sorting the semiconductor devices based on results of the test program and the lot sorting information comprises moving the semiconductor devices to customer trays which are separated according to respective lot numbers to which the semiconductor devices belong. ### Claim 11 A test method for a semiconductor device, comprising: sequentially loading a test tray having semiconductor devices of first and second lots arranged thereon into first and second tester handlers which perform different test programs; storing lot information of each of the semiconductor devices when the semiconductor devices are loaded into the first and second tester handlers; sequentially performing the test programs on the semiconductor devices in the first tester handler, and then, sequentially performing the test programs on the semiconductor devices in the second tester handler; matching the ID information with the lot information of each of the semiconductor devices when each of the test programs is performed, to generate lot sorting information; and after performing a final test program, sorting the semiconductor devices based on test results and the lot sorting information. ### Claim 12 (depends on 11) The test method for a semiconductor device of claim 11, wherein loading the test tray into the first tester handler comprises: providing the first tester handler with a first customer tray having the semiconductor devices of the first lot arranged thereon; providing the first tester handier with a second customer tray having the semiconductor devices of the second lot arranged thereon; and moving the semiconductor devices on the first and second trays to one test tray of the first tester handler. ### Claim 13 (depends on 12) The test method for a semiconductor device of claim 12, wherein sorting the semiconductor devices based on the test results and the lot sorting information comprises: moving the semiconductor devices which are determined to be non-defective according to the test results and have the lot information of the first lot to a third customer tray; and moving the semiconductor devices which are determined to be non-defective according to the test results and have the lot information of the second lot to a fourth customer tray. ### Claim 14 (depends on 13) The test method for a semiconductor device of claim 13, wherein sorting the semiconductor devices based on the test results and the lot sorting information further comprises moving the semiconductor devices which are determined to be defective according to the test results and have the lot information of the first lot or the second lot to a fifth customer tray. ### Claim 15 (depends on 11) The test method for a semiconductor device of claim 11, wherein matching the ID information with the lot information of each of the semiconductor devices comprises: reading the ID information of each of the semiconductor devices when the test program is performed by a tester; and mapping the ID information of each of the semiconductor devices to a lot number to which the semiconductor device belongs. ### Claim 16 A test system for a semiconductor device, comprising: a tester configured to test semiconductor devices; a tester server connected to the tester, and configured to provide a test program to the tester and configured to match ID information with lot information of each of the semiconductor devices to generate lot sorting information when the test program is performed; and a tester handler connected to the tester, and configured to load and unload the semiconductor devices into and from a test chamber to electrically test the semiconductor devices and configured to sort the semiconductor devices based on test results and the lot sorting information, wherein a test tray having the semiconductor devices of first and second lots arranged thereon is loaded into the tester handler, and the tester performs the test program on the semiconductor devices of the first and second lots on the test tray at the same time. ### Claim 17 (depends on 16) The test system for a semiconductor device of claim 16, wherein the tester handler moves the semiconductor devices which are determined to be non-defective according to the test results and have the lot information of the first lot to a first tray, and the tester handler moves the semiconductor devices which are determined to be non-defective according to the test results and have the lot information of the second lot to a second tray. ### Claim 18 (depends on 17) The test system for a semiconductor device of claim 17, wherein the tester handler moves the semiconductor devices which are determined to be defective according to the test results and have the lot information of the first lot or the second lot to a third tray. ### Claim 19 (depends on 16) The test system for a semiconductor device of claim 16, wherein the tester reads ID information of each of the semiconductor devices when performing the test program, and the tester server maps the ID information of each of the semiconductor devices to a lot number to which the semiconductor device belongs, to generate the lot sorting information.