# US 11,112,430 B2 · Probe head and electronic device testing system > Agents: this data is available as JSON from the patentgrep API and MCP server — see https://patentgrep.com/llms.txt - Number: US 11,112,430 B2 - Document ID: US11112430B2 - Status: Granted - Kind: B2 - Application number: 16/366,197 - Filed: 2019-03-27 - Published: 2020-10-01 - Granted: 2021-09-07 - Earliest claimed: 2019-03-27 - Assignees: Intel Corporation - Applicants: Intel Corporation - Inventors: Anil Kaza; Donald E. Edenfeld; Todd P. Albertson; Patrick Whiting - Web page: https://patentgrep.com/patent/US11112430B2 ## CPC - G01R 1/07314: {the body of the probe being perpendicular to test object, e.g. bed of nails or probe with bump contacts on a rigid support (on an elastic support, e.g. a film, G01R1/0735)} - G01R 1/06705: {Apparatus for holding or moving single probes (for moving multiple probe heads or ICs under test G01R31/2886)} - G01R 1/06711: {Probe needles; Cantilever beams; "Bump" contacts; Replaceable probe pins} - G01R 1/06755: {Material aspects} - G01R: MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES (indicating correct tuning of resonant circuits H03J3/12) ## Abstract A probe head may be utilized to test an electronic device. The probe head may include a probe axis extending along a length of the probe head. The probe head may include a probe core including a first metal. The probe core may include a core surface having a first dimension. The first dimension may be perpendicular to the probe axis. The probe core may include a probe tip, for instance extending from the core surface along the probe axis. The probe tip has a second dimension that may be perpendicular to the probe axis. The second dimension may be less than the first dimension of the core surface. The probe head may include a cladding layer that includes a second metal. The cladding layer may be coupled around a perimeter of the probe core. The probe tip may extend beyond the cladding layer. ## Claims ### Claim 1 A probe head for testing electronic devices, comprising: a probe axis extending along a length of the probe head; a probe core including a first metal, the probe core including: a core surface having a first dimension, wherein the first dimension is perpendicular to the probe axis; a probe tip extending from the core surface along the probe axis, wherein: the probe tip has a second dimension that is perpendicular to the probe axis; and the second dimension is less than the first dimension of the core surface; a cladding layer including a second metal, wherein the cladding layer is coupled around a perimeter of the probe core; and wherein the probe tip extends beyond the cladding layer, and the cladding layer extends beyond the core surface. ### Claim 2 (depends on 1) The probe head of claim 1, wherein the probe core includes a probe neck, and the cladding layer at least partially surrounds the probe neck. ### Claim 3 (depends on 1) The probe head of claim 1, wherein the probe core includes a probe neck that offsets the probe tip from the perimeter of the probe core. ### Claim 4 (depends on 3) The probe head of claim 3, wherein the probe neck is rounded. ### Claim 5 (depends on 1) The probe head of claim 1, wherein the second dimension is within a range of approximately 8 micrometers to 18 micrometers. ### Claim 6 (depends on 1) The probe head of claim 1, wherein the first metal includes tungsten. ### Claim 7 (depends on 1) The probe head of claim 1, wherein the cladding layer includes a third metal and the second metal is alloyed with the third metal. ### Claim 8 (depends on 7) The probe head of claim 7, wherein the second metal includes gold and the third metal includes silver. ### Claim 9 (depends on 1) The probe head of claim 1, wherein the probe tip includes a planar tip surface substantially parallel with the core surface. ### Claim 10 (depends on 1) The probe head of claim 1, further comprising a crown layer coupled with the cladding layer, wherein the crown layer includes phosphorous. ### Claim 11 A system for testing electronic devices, comprising: one or more probe heads, including: a probe axis extending along a length of the probe head; a probe core including a first metal, the probe core including: a core surface having a first dimension, wherein the first dimension is perpendicular to the probe axis; a probe tip extending from the core surface along the probe axis, wherein: the probe tip has a second dimension that is perpendicular to the probe axis; and the second dimension is less than the first dimension of the core surface; a cladding layer including a second metal, wherein the cladding layer is coupled around a perimeter of the probe core; and wherein the probe tip extends beyond the cladding layer, and the cladding layer extends beyond the core surface; a probe holder including one or more probe sockets, wherein the probe sockets are configured to receive the one or more probe heads; and a substrate including one or more contacts configured to engage with the one or more probe heads, wherein the one or more contacts transmit an electrical signal between the substrate and the one or more probe heads. ### Claim 12 (depends on 11) The system of claim 11, further comprising a signal generator in communication with the substrate, wherein the signal generator is configured to produce the electrical signal. ### Claim 13 (depends on 11) The system of claim 11, wherein the one or more probe heads are each respectively coupled to the one or contacts with solder. ### Claim 14 (depends on 11) The system of claim 11, wherein the probe holder includes a ceramic material. ### Claim 15 (depends on 11) The system of claim 11, wherein the one or more probe heads are arranged in an array. ### Claim 16 A method for manufacturing an electronic device testing system, comprising: etching a cladding layer of a probe head with a first etchant to remove a portion of the cladding layer from a probe core of the probe head, wherein the cladding layer includes a first metal; etching the probe core with a second etchant to remove a portion of the probe core, wherein the probe core includes a second metal; and wherein the cladding layer extends beyond a probe core surface of the probe core, and the cladding layer extends beyond the core surface. ### Claim 17 (depends on 16) The method of claim 16, further comprising planarizing a portion of the probe core. ### Claim 18 (depends on 16) The method of claim 16, wherein the probe head is included in a plurality of probe heads, and further comprising coupling the plurality of probe heads with one or more contacts of a substrate, and wherein the substrate is configured to transmit an electrical signal to the one or more probe heads. ### Claim 19 (depends on 16) The method of claim 16, further comprising compressing the probe head to change a cross section of the probe head. ### Claim 20 (depends on 16) The method of claim 16, further comprising cutting a wire to provide the probe head, wherein the wire includes the cladding layer is coupled around a perimeter of the probe core.